非透明扁平部件的平行度测量方法

Parallelism measurement method for nontransparent flat parts.

作者信息

Zhang Juntao, Pan Bo, Liu Huan, Zhu Xu, Kang Renke, Du Dongxing, Guo Jiang

出版信息

Appl Opt. 2022 Jun 10;61(17):4993-5001. doi: 10.1364/AO.457755.

Abstract

Nontransparent flat parts with weak rigidity are widely used in precision physics experiments, aerospace, and other fields in which parallelism is required. However, existing methods cannot meet requirements due to the limitation of measurement size and accuracy. This paper proposes a new method for measuring parallelism of nontransparent flat parts with high accuracy and then builds a submicrometer-level parallelism measuring system. The 3D model of the whole part is reconstructed by thickness and flatness, which are measured respectively. Subsequently, parallelism is evaluated by the principle of minimum directional zone. The method is verified by an experiment with a thin copper substrate sized ⊘200×2.48 on the parallelism measuring system. The experiment result shows that the part's parallelism is 7.41 µm, and the expanded uncertainty of parallelism measurement system is 0.34 µm, =2.

摘要

刚性较弱的非透明平板零件在精密物理实验、航空航天等要求平行度的领域有着广泛应用。然而，由于测量尺寸和精度的限制，现有方法无法满足需求。本文提出一种高精度测量非透明平板零件平行度的新方法，并构建了亚微米级平行度测量系统。通过分别测量厚度和平整度来重建整个零件的三维模型。随后，根据最小方向区域原理评估平行度。在平行度测量系统上对尺寸为⊘200×2.48的薄铜基板进行实验验证了该方法。实验结果表明，该零件的平行度为7.41 µm，平行度测量系统的扩展不确定度为0.34 µm，k = 2。