Appl Opt. 2022 May 20;61(15):4254-4258. doi: 10.1364/AO.456288.
Oxygen is a gas essential to human life and industrial processes. Here, we developed a highly sensitive oxygen gas sensor based on deep ultraviolet absorption spectroscopy between 180 and 200 nm. The implemented method relies on differential absorption spectra extracted from the obtained high-resolution absorption spectra. The detection capability was greatly improved (six-fold) by eliminating air from the open optical path, achieved by purging the entire system with pure nitrogen. A linear relationship was obtained between the optical parameter and the oxygen concentration with a slope of 0.107 and determination coefficient of 0.999. A detection limit of 24 ppm per meter was determined with a response time of 25 s. Good repeatability (=16) and stability were confirmed. We demonstrated that this system can detect ppm oxygen levels with high sensitivity and low uncertainty.
氧气是人类生命和工业过程所必需的气体。在这里，我们开发了一种基于 180 至 200nm 深紫外吸收光谱的高灵敏度氧气气体传感器。所采用的方法依赖于从获得的高分辨率吸收光谱中提取的差分吸收光谱。通过用纯氮气吹扫整个系统，从开放光路中去除空气，大大提高了检测能力（提高了六倍）。光参数与氧气浓度之间存在线性关系，斜率为 0.107，决定系数为 0.999。响应时间为 25s 时，检测限为每米 24ppm。确认了良好的重复性（=16）和稳定性。我们证明，该系统可以以高灵敏度和低不确定性检测ppm 级别的氧气水平。
