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光学薄膜的统计信息增强稳健设计方法

Statistical information enhanced robust design method of optical thin film.

作者信息

Dai Jianglin, Zhang Gong, Song Shigeng, Deng Zeyu, Wei Zihan

出版信息

Opt Express. 2022 Sep 26;30(20):36826-36838. doi: 10.1364/OE.471998.

DOI:10.1364/OE.471998
PMID:36258604
Abstract

A novel merit function was constructed using the spectral coefficient average error and standard deviation, which can simultaneously optimize the expectation of spectral coefficient error and the envelope of standard deviation. Thus, a multi-objective optimization strategy based on Non-Dominated Sorting Genetic Algorithm and Sequential quadratic programming was proposed. By comparing result of wideband anti-reflection film, cut-off filter and Infrared dual-band filter designed by the conventional algorithm and the new algorithm, the control effect of the new algorithm on sensitivity of film parameters error was verified. The results show that the novel design method has the characteristics of time-efficient calculations and is capable of effectively improving the production yield of the film system, which has practical significance.

摘要

利用光谱系数平均误差和标准差构建了一种新型优值函数,该函数可同时优化光谱系数误差的期望值和标准差包络。因此,提出了一种基于非支配排序遗传算法和序列二次规划的多目标优化策略。通过比较传统算法和新算法设计的宽带减反射膜、截止滤光片和红外双波段滤光片的结果,验证了新算法对薄膜参数误差敏感性的控制效果。结果表明,该新型设计方法具有计算效率高的特点,能够有效提高薄膜系统的生产成品率,具有实际意义。

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