Yang Manzhi, Zhang Xiaodong, Zhang Chuanwei, Wu Hongzhang, Yang Yizhi
College of Mechanical Engineering, Xi'an University of Science and Technology, No. 58 Yanta Middle Road, Xi'an 710054, China.
Xi'an Institute of Metrology, Xi'an 710068, China.
Micromachines (Basel). 2022 Sep 29;13(10):1636. doi: 10.3390/mi13101636.
A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system's motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.
微驱动系统是宏微驱动技术和精密定位技术的关键组成部分,其中微驱动减速系统能够提供更精确的运动以及适合小空间的运动。因此,研究精密微驱动减速系统很有必要。本文基于一种在非运动方向上无受力和位移的微驱动减速机构的设计,设计了一种由压电陶瓷驱动器(PZT)驱动的精密微驱动减速系统,并对该系统的强度、动态和运动性能进行了分析。首先,基于柔性铰链杠杆原理和附加力平衡原理,设计了一种减速比可调的精密微驱动减速机构。其次,通过有限元分析对系统的强度性能进行了分析,并通过有限元分析和实验对系统的动态性能进行了分析。最后,通过理论分析、有限元方法和实验对系统的运动学性能进行了分析,并基于三种方法的线性拟合方程计算了运动线性方程。研究结果表明,该系统具有良好的强度和动态性能,且系统运动具有高精度和良好线性度的优点。该研究对微驱动机构的设计和性能研究具有一定的参考价值。