Research on Continuous Error Compensation of a Sub-Arc-Second Macro/Micro Dual-Drive Rotary System.

In this paper, a sub-arc-second macro/micro dual-drive rotary system is designed, and the continuous compensation of the system error and its experimental research are completed. First, the macro-drive system is driven by a direct-drive motor, and the micro-drive system uses a piezoelectric ceramic to drive the micro-drive rotary mechanism; the system uses a micro-drive system to compensate the motion error of the macro-drive system, and uses circular grating to feedback the displacement of the macro/micro total output turntable to form a macro/micro dual-drive closed-loop control system. Second, based on the establishment of the system error model, the design of the system's continuous error compensation scheme is completed. Finally, the positioning accuracy testing of the system, direct error compensation of the macro-drive, manual error compensation of the macro-drive, error compensation performance of the micro-drive part and macro/micro compensation of the system are carried out in the study. The results show that the repeated positioning error and the positioning error of the system are reduced by 78.8% and 95.2%, respectively, after macro/micro compensation. The correctness and effectiveness of the designed system design, error compensation and control method are verified through performance tests, and its positioning accuracy is verified to the sub-arc-second (0.1 arcsecond) level. The research in this paper has important reference value for the development of ultra-precision macro/micro dual-drive technology.