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一种用于轴对称谐振式陀螺仪的高精度刚度轴识别方法。

A High-Precision Method of Stiffness Axes Identification for Axisymmetric Resonator Gyroscopes.

作者信息

Xiong Junhao, Yang Kaiyong, Xia Tao, Li Jingyu, Jia Yonglei, Tao Yunfeng, Pan Yao, Luo Hui

机构信息

College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China.

出版信息

Micromachines (Basel). 2022 Oct 21;13(10):1793. doi: 10.3390/mi13101793.

DOI:10.3390/mi13101793
PMID:36296146
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9611523/
Abstract

Axisymmetric resonators are key elements of Coriolis vibratory gyroscopes (CVGs). The performance of a CVG is closely related to the stiffness and damping symmetry of its resonator. The stiffness symmetry of a resonator can be effectively improved by electrostatic tuning or mechanical trimming, both of which need an accurate knowledge of the azimuth angles of the two stiffness axes of the resonator. Considering that the motion of a non-ideal axisymmetric resonator can be decomposed as two principal oscillations with two different natural frequencies along two orthogonal stiffness axes, this paper introduces a novel high-precision method of stiffness axes identification. The method is based on measurements of the phase difference between the signals detected at two orthogonal sensing electrodes when an axisymmetric resonator is released from all the control forces of the force-to-rebalance mode and from different initial pattern angles. Except for simplicity, our method works with the eight-electrodes configuration, in no need of additional electrodes or detectors. Furthermore, the method is insensitive to the variation of natural frequencies and operates properly in the cases of either large or small frequency splits. The introduced method is tested on a resonator gyroscope, and two stiffness axes azimuth angles are obtained with a resolution better than 0.1°. A comparison of the experimental results and theoretical model simulations confirmed the validity of our method.

摘要

轴对称谐振器是科里奥利振动陀螺仪(CVG)的关键元件。CVG的性能与其谐振器的刚度和阻尼对称性密切相关。谐振器的刚度对称性可以通过静电调谐或机械微调有效提高,这两种方法都需要准确了解谐振器两个刚度轴的方位角。考虑到非理想轴对称谐振器的运动可以分解为沿两个正交刚度轴具有两个不同固有频率的两个主振荡,本文介绍了一种新颖的高精度刚度轴识别方法。该方法基于当轴对称谐振器从力平衡模式的所有控制力和不同的初始模式角度释放时,在两个正交传感电极处检测到的信号之间的相位差测量。除了简单之外,我们的方法适用于八电极配置,无需额外的电极或探测器。此外,该方法对固有频率的变化不敏感,并且在大频率分裂或小频率分裂的情况下都能正常运行。所介绍的方法在谐振器陀螺仪上进行了测试,获得了两个刚度轴方位角,分辨率优于0.1°。实验结果与理论模型模拟的比较证实了我们方法的有效性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/f748243061c5/micromachines-13-01793-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/b9ffc76ac915/micromachines-13-01793-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e5843fedf260/micromachines-13-01793-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e1fee942bc77/micromachines-13-01793-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e2d88390bcbc/micromachines-13-01793-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/da142198c017/micromachines-13-01793-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/853df04952b0/micromachines-13-01793-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/1d818bfb00d0/micromachines-13-01793-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/1d97dc5684f4/micromachines-13-01793-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/2b7f9f3e5aaa/micromachines-13-01793-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/f748243061c5/micromachines-13-01793-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/b9ffc76ac915/micromachines-13-01793-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e5843fedf260/micromachines-13-01793-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e1fee942bc77/micromachines-13-01793-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/e2d88390bcbc/micromachines-13-01793-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/da142198c017/micromachines-13-01793-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/853df04952b0/micromachines-13-01793-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/1d818bfb00d0/micromachines-13-01793-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/1d97dc5684f4/micromachines-13-01793-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/2b7f9f3e5aaa/micromachines-13-01793-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ce5/9611523/f748243061c5/micromachines-13-01793-g010.jpg

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A Temperature Drift Suppression Method of Mode-Matched MEMS Gyroscope Based on a Combination of Mode Reversal and Multiple Regression.一种基于模式反转与多元回归相结合的模式匹配微机电系统陀螺仪温度漂移抑制方法
Micromachines (Basel). 2022 Sep 20;13(10):1557. doi: 10.3390/mi13101557.
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A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes.
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Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller.基于代理的滑模控制器的科里奥利振动微机电系统陀螺仪驱动轴控制
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