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双波长和可变延迟的双超短激光脉冲对熔融石英的烧蚀

Fused silica ablation by double ultrashort laser pulses with dual wavelength and variable delays.

作者信息

Gaudfrin K, Lopez J, Gemini L, Delaigue M, Hönninger C, Kling R, Duchateau G

出版信息

Opt Express. 2022 Oct 24;30(22):40120-40135. doi: 10.1364/OE.461502.

DOI:10.1364/OE.461502
PMID:36298950
Abstract

Today, glass and other similar dielectric materials are widely used in modern manufacturing. However, glass is a brittle and a heat sensitive material. Laser technology is used to process glass but quality and throughput are still a key issue. In the present paper, we investigate dual-wavelength double ultrashort laser pulses in order to control free electrons dynamics and subsequent ablation for fused silica processing, and further improve the understanding of this laser-material interaction. We used a high average power Yb-doped femtosecond laser source (100 W) with two optical lines exhibiting different pulse durations and wavelengths (500 fs at 515 nm; and 1 or 10 ps at 1030 nm) with various fluences and delays. The best configuration in terms of ablation efficiency is expected to take place when the green pulse first induces free electrons, followed by their heating by the red pulse. The obtained results are discussed in terms of optical transmission as well as ablated volume, and are compared with single pulse ablation. Our experimental results are supported by absorbed energy density calculations based on a model considering the two-color laser induced electron dynamics, including photoionization, laser heating of free electrons, and their recombination. We demonstrate that there is an optimal cooperating effect between the two sub-pulses for a 1-ps delay, nevertheless there is no beneficial effect in splitting the beam for optimizing fused silica ablation compared with the single-pulse green configuration.

摘要

如今,玻璃及其他类似的介电材料在现代制造业中被广泛应用。然而,玻璃是一种脆性且对热敏感的材料。激光技术被用于加工玻璃,但质量和产量仍是关键问题。在本文中,我们研究双波长双超短激光脉冲,以控制自由电子动力学及随后的熔融石英加工烧蚀,并进一步增进对这种激光与材料相互作用的理解。我们使用了一个高平均功率的掺镱飞秒激光源(100 W),其两条光线具有不同的脉冲持续时间和波长(515 nm处为500 fs;1030 nm处为1或10 ps),并具有不同的能量密度和延迟。就烧蚀效率而言,最佳配置预计在绿色脉冲首先诱导出自由电子,随后由红色脉冲对其进行加热时出现。所得结果从光传输以及烧蚀体积方面进行了讨论,并与单脉冲烧蚀进行了比较。我们的实验结果得到了基于一个考虑双色激光诱导电子动力学(包括光电离、自由电子的激光加热及其复合)的模型的吸收能量密度计算的支持。我们证明,对于1 ps的延迟,两个子脉冲之间存在最佳协同效应,然而,与单脉冲绿色配置相比,在优化熔融石英烧蚀时将光束分开并无益处。

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