Leshchenko E D, Dubrovskii V G
Submicron Heterostructures for Microelectronics, Research & Engineering Center, RAS, 26 Politekhnicheskaya, 194021, St. Petersburg, Russia.
Faculty of Physics, St. Petersburg State University, Universitetskaya Embankment 13B, 199034 St. Petersburg, Russia.
Nanotechnology. 2022 Nov 25;34(6). doi: 10.1088/1361-6528/aca1c9.
Kinetic modeling of the formation of axial III-V nanowire heterostructures grown by the Au-catalyzed vapor-liquid-solid method is presented. The method is based on a combination of kinetic growth theory for different binaries at the liquid-solid interface and thermodynamics of ternary liquid and solid alloys. Non-stationary treatment of the compositional change obtained by swapping material fluxes allows us to compute the interfacial abruptness across nanowire heterostructures and leads to the following results. At high enough supersaturation in liquid, there is no segregation of dissimilar binaries in solid even for materials with strong interactions between III and V pairs, such as InGaAs. This leads to the suppression of the miscibility gaps by kinetic factors. Increasing the Au concentration widens the heterointerface at low Au content and narrows it at high Au content in a catalyst droplet. The model fits quite well the data on the compositional profiles across nanowire heterostructures based on both group III and group V interchange. Very sharp heterointerfaces in double of InAs/InP/InAs nanowire heterostructures is explained by a reduced reservoir effect due to low solubility of group V elements in liquid.
本文提出了通过金催化气-液-固方法生长轴向III-V族纳米线异质结构的动力学模型。该方法基于液-固界面处不同二元体系的动力学生长理论以及三元液态和固态合金的热力学。通过交换材料通量获得的成分变化的非稳态处理,使我们能够计算纳米线异质结构的界面陡度,并得出以下结果。在液体中足够高的过饱和度下,即使对于III族和V族对之间相互作用很强的材料(如InGaAs),固体中不同二元体系也不会发生偏析。这导致动力学因素抑制了互溶间隙。增加金的浓度会使催化剂液滴中低金含量时的异质界面变宽,高金含量时变窄。该模型与基于III族和V族互换的纳米线异质结构成分分布数据拟合得很好。InAs/InP/InAs纳米线异质结构双层中非常尖锐的异质界面是由于V族元素在液体中的低溶解度导致的储库效应降低所致。