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铟镓砷量子点从形成到消亡过程中互扩散和偏析的作用。

Role of Interdiffusion and Segregation during the Life of Indium Gallium Arsenide Quantum Dots, from Cradle to Grave.

作者信息

Walther Thomas

机构信息

Department of Electronic & Electrical Engineering, University of Sheffield, Mappin Building, Mappin Street, Sheffield S1 3JD, UK.

出版信息

Nanomaterials (Basel). 2022 Oct 31;12(21):3850. doi: 10.3390/nano12213850.

Abstract

This article summarizes our understanding of the interplay between diffusion and segregation during epitaxial growth of InGaAs and InAs quantum dots. These quantum dots form spontaneously on flat GaAs (001) single-crystalline substrates by the so-called Stranski-Krastanow growth mechanism once a sufficient amount of indium has accumulated on the surface. Initially a perfectly flat wetting layer is formed. This strained layer then starts to roughen as strain increases, leading first to small, long-range surface undulations and then to tiny coherent islands. These continue to grow, accumulating indium both from the underlying wetting layer by lateral indium segregation and from within these islands by vertical segregation, which for InGaAs deposition results in an indium-enriched InGaAs alloy in the centre of the quantum dots. For pure InAs deposition, interdiffusion also results in an InGaAs alloy. Further deposition can lead to the formation of misfit dislocations that nucleate at the edges of the islands and are generally sought to be avoided. Overgrowth by GaAs or InGaAs alloys with low indium content commences preferentially between the islands, avoiding their strained edges, which initially leads to trench formation. Further deposition is necessary to cap these quantum dots effectively and to re-gain an almost flat surface that can then be used for subsequent deposition of multiple layers of quantum dots as needed for many optoelectronic devices.

摘要

本文总结了我们对InGaAs和InAs量子点外延生长过程中扩散与偏析相互作用的理解。一旦表面积累了足够量的铟,这些量子点通过所谓的斯特兰斯基-克拉斯坦诺夫生长机制在平坦的GaAs(001)单晶晶片上自发形成。最初形成一个完美平坦的润湿层。随着应变增加,这个应变层开始变得粗糙,首先导致小的、长程的表面起伏,然后形成微小的相干岛。这些岛继续生长,通过横向铟偏析从下面的润湿层以及通过垂直偏析从这些岛内积累铟,对于InGaAs沉积,这导致量子点中心形成富铟的InGaAs合金。对于纯InAs沉积,互扩散也会形成InGaAs合金。进一步沉积会导致失配位错在岛的边缘形核,通常需要避免这种情况。低铟含量的GaAs或InGaAs合金优先在岛之间开始外延生长,避开它们应变的边缘,这最初会导致沟槽形成。需要进一步沉积以有效地覆盖这些量子点,并重新获得几乎平坦的表面,然后可根据许多光电器件的需要用于后续多层量子点的沉积。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7b03/9656008/e99a6e03b183/nanomaterials-12-03850-g004.jpg

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