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通过层层递进的方法,开发复杂嵌段共聚物结构的竞争注册领域。

Competitive Registration Fields for The Development of Complex Block Copolymer Structures by A Layer-by-Layer Approach.

机构信息

Univ. Bordeaux, CNRS, Bordeaux INP, LCPO, UMR 5629, Pessac, F-33600, France.

出版信息

Small. 2023 Feb;19(7):e2205254. doi: 10.1002/smll.202205254. Epub 2022 Dec 11.

Abstract

Block copolymer (BCP) self-assembly in thin films is an elegant method to generate nanometric features with tunable geometrical configurations. By combining directed assembly and hybridization methods, advances in nano-manufacturing have been attested over the past decades with flagship applications in lithography and optics. Nevertheless, the range of geometrical configurations is limited by the accessible morphologies inherent to the energy minimization process involved in BCP self-assembly. Layering of nanostructured BCP thin films has been recently proposed in order to enrich the span of nanostructures derived from BCP self-assembly with the formation of non-native heterostructures such as double-layered arrays of nanowires or dots-on-line and dots-in-hole hierarchical structures. In this work, the layer-by-layer method is further exploited for the generation of nano-mesh arrays using nanostructured BCP thin films. In particular, a subtle combination of chemical and topographical fields is leveraged in order to demonstrate design rules for the controlled registration of a BCP layer on top of an underneath immobilized one by the precise tuning of the interfacial chemical field between the two BCP layers.

摘要

嵌段共聚物 (BCP) 在薄膜中的自组装是一种生成具有可调几何构型的纳米级特征的优雅方法。通过结合定向组装和杂交方法,过去几十年的纳米制造技术取得了进展,其标志性应用包括光刻和光学。然而,几何构型的范围受到 BCP 自组装中涉及的能量最小化过程所固有的可访问形态的限制。最近提出了将纳米结构的 BCP 薄膜分层,以便通过形成非本征异质结构(例如纳米线的双层阵列或线点和孔点分层结构)来丰富源自 BCP 自组装的纳米结构的范围。在这项工作中,层层法进一步用于使用纳米结构的 BCP 薄膜生成纳米网阵列。特别地,利用化学和形貌场的微妙组合,通过精确调整两个 BCP 层之间的界面化学场,来证明在下面固定的 BCP 层上精确注册 BCP 层的控制规则。

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