Strahl Thomas, Steinebrunner Jonas, Weber Christian, Wöllenstein Jürgen, Schmitt Katrin
Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.
Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany.
Photoacoustics. 2022 Dec 1;29:100428. doi: 10.1016/j.pacs.2022.100428. eCollection 2023 Feb.
An innovative laser based photoacoustic (PA) gas sensing concept with intrinsic miniaturization potential was developed and investigated for methane trace gas detection. An interband cascade laser (ICL) with an optical power of 8.5 mW targets a methane (CH) absorption line feature around 3057.7 cm (or 3270 nm). The ICL was focused into the sound port of a MEMS microphone, where the PA signal was generated and detected using a wavelength modulation concept (2f-WMS-PAS). The MEMS microphone was successfully implemented as an intrinsically miniaturized PA cell being gas sensing volume, acoustic resonator and sound transducer at once. Frequencies between 2 kHz and 100 kHz were investigated and used for methane detection. A sensitive and resonant methane detection at 41.8 kHz was investigated by concentration variations between 0 and 10 ppm CH in N. A limit of detection ( -LOD) of 329 ppb was estimated. The long term stability of this sensor was investigated by the measurement of methane in ambient air. A noise equivalent concentration (NEC) of 14 ppb (parts per billion) at an average time of 10 s was estimated. This value corresponds to a normalized noise equivalent absorption (NNEA) of W cm Hz. Using the MEMS microphone directly as PA cell offers the possibility for an extremely miniaturized, highly sensitive and very cost-efficient photoacoustic trace gas sensor.
开发并研究了一种具有内在小型化潜力的基于激光的创新光声(PA)气体传感概念,用于甲烷痕量气体检测。一台光功率为8.5毫瓦的带间级联激光器(ICL)瞄准3057.7厘米(或3270纳米)附近的甲烷(CH)吸收线特征。ICL被聚焦到一个MEMS麦克风的声端口,在那里利用波长调制概念(2f-WMS-PAS)产生并检测光声信号。MEMS麦克风成功地作为一个本质上小型化的光声池实现,它同时是气体传感体积、声学谐振器和声音换能器。研究了2千赫至100千赫之间的频率并将其用于甲烷检测。通过在氮气中0至10 ppm CH的浓度变化,研究了在41.8千赫时的灵敏且共振的甲烷检测。估计检测限(-LOD)为329 ppb。通过测量环境空气中的甲烷来研究该传感器的长期稳定性。估计在平均时间为10秒时的噪声等效浓度(NEC)为14 ppb(十亿分之一)。该值对应于归一化噪声等效吸收(NNEA)为 瓦厘米赫兹。直接将MEMS麦克风用作光声池为实现极其小型化、高灵敏度且成本效益极高的光声痕量气体传感器提供了可能性。