Fu Lujun, Lu Ping, Sima Chaotan, Zhao Jinbiao, Pan Yufeng, Li Tailin, Zhang Xiaohang, Liu Deming
Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.
Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen 518000, China.
Photoacoustics. 2022 Jun 30;27:100382. doi: 10.1016/j.pacs.2022.100382. eCollection 2022 Sep.
A small-volume highly-sensitive photoacoustic spectroscopy (PAS) methane detection system based on differential silicon cantilever optical microphones (SCOMs) is proposed and experimentally demonstrated. The system contains a compact non-resonant photoacoustic cell with a small volume of 1.2 mL and symmetrically-located dual SCOMs, as well as a distributed feedback laser at 1650.96 nm. The two identical SCOMs utilize the Fabry-Perot interferometric fiber-optic structure, with the differential Q-point demodulation algorithm to suppress the external vibration noise. Experimental results show that the SCOM has a high displacement sensitivity about 7.1 µm/Pa at 150 Hz and within 2.5 dB fluctuation between 5 Hz and 250 Hz. In the PAS gas sensing experiment, the normalized noise equivalent absorption coefficient of the PAS system is estimated to be 1.2 × 10 cm·W·Hz and the minimum detection limit for methane is about 111.2 ppb with 1 s integration time. External disturbance is also applied to the dual SCOM system and results show excellent stability and noise resistance. The proposed PAS system exhibits superiorities of low gas consumption, high sensitivity and immunity to vibration and electromagnetic interference, which has an enormous potential in medicine, industry and environment.
提出并通过实验证明了一种基于差分硅悬臂光学麦克风(SCOM)的小体积高灵敏度光声光谱(PAS)甲烷检测系统。该系统包括一个体积为1.2 mL的紧凑型非共振光声池、对称放置的双SCOM以及一台波长为1650.96 nm的分布反馈激光器。两个相同的SCOM采用法布里-珀罗干涉光纤结构,并利用差分Q点解调算法来抑制外部振动噪声。实验结果表明,SCOM在150 Hz时具有约7.1 µm/Pa的高位移灵敏度,在5 Hz至250 Hz之间波动在2.5 dB以内。在PAS气体传感实验中,PAS系统的归一化噪声等效吸收系数估计为1.2×10 cm·W·Hz,甲烷的最小检测限在1 s积分时间下约为111.2 ppb。还对双SCOM系统施加了外部干扰,结果显示出优异的稳定性和抗噪声能力。所提出的PAS系统具有低气体消耗、高灵敏度以及抗振动和电磁干扰的优势,在医学、工业和环境领域具有巨大潜力。