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高应变诱导的VO薄膜电子性质的局部改性

High-Strain-Induced Local Modification of the Electronic Properties of VO Thin Films.

作者信息

Birkhölzer Yorick A, Sotthewes Kai, Gauquelin Nicolas, Riekehr Lars, Jannis Daen, van der Minne Emma, Bu Yibin, Verbeeck Johan, Zandvliet Harold J W, Koster Gertjan, Rijnders Guus

机构信息

MESA+ Institute of Nanotechnology, University of Twente, P.O. Box 217, 7500AEEnschede, The Netherlands.

Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020Antwerp, Belgium.

出版信息

ACS Appl Electron Mater. 2022 Dec 27;4(12):6020-6028. doi: 10.1021/acsaelm.2c01176. Epub 2022 Nov 18.

Abstract

Vanadium dioxide (VO) is a popular candidate for electronic and optical switching applications due to its well-known semiconductor-metal transition. Its study is notoriously challenging due to the interplay of long- and short-range elastic distortions, as well as the symmetry change and the electronic structure changes. The inherent coupling of lattice and electronic degrees of freedom opens the avenue toward mechanical actuation of single domains. In this work, we show that we can manipulate and monitor the reversible semiconductor-to-metal transition of VO while applying a controlled amount of mechanical pressure by a nanosized metallic probe using an atomic force microscope. At a critical pressure, we can reversibly actuate the phase transition with a large modulation of the conductivity. Direct tunneling through the VO-metal contact is observed as the main charge carrier injection mechanism before and after the phase transition of VO. The tunneling barrier is formed by a very thin but persistently insulating surface layer of the VO. The necessary pressure to induce the transition decreases with temperature. In addition, we measured the phase coexistence line in a hitherto unexplored regime. Our study provides valuable information on pressure-induced electronic modifications of the VO properties, as well as on nanoscale metal-oxide contacts, which can help in the future design of oxide electronics.

摘要

二氧化钒(VO₂)因其著名的半导体-金属转变,是电子和光学开关应用的热门候选材料。由于长程和短程弹性畸变的相互作用,以及对称性变化和电子结构变化,对其进行研究具有极大的挑战性。晶格自由度和电子自由度的固有耦合为单畴的机械驱动开辟了道路。在这项工作中,我们展示了利用原子力显微镜,通过纳米尺寸的金属探针施加可控量的机械压力时,我们能够操纵和监测VO₂的可逆半导体-金属转变。在临界压力下,我们可以通过电导率的大调制度可逆地驱动相变。在VO₂相变前后,直接隧穿VO₂-金属接触被观察为主要的电荷载流子注入机制。隧穿势垒由VO₂非常薄但持续绝缘的表面层形成。诱导转变所需的压力随温度降低。此外,我们测量了一个迄今未探索区域的相共存线。我们的研究提供了关于压力诱导VO₂性质的电子修饰以及纳米尺度金属-氧化物接触的有价值信息,这有助于未来氧化物电子学的设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ae3/9798830/05d31f3d0ece/el2c01176_0001.jpg

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