Zheng Jishi, Yu Wenying, Ding Zhigang, Kong Linghua, Liu Shuqi, Chen Qingqiang
Appl Opt. 2022 Nov 10;61(32):9634-9645. doi: 10.1364/AO.474272.
Optical filters, one of the essential parts of many optical instruments, are used to select a specific radiation band of optical devices. There are specifications for the surface quality of the optical filter in order to ensure the instrument's regular operation. The traditional machine learning techniques for examining the optical filter surface quality mentioned in the current studies primarily rely on the manual extraction of feature data, which restricts their ability to detect optical filter surfaces with multiple defects. In order to solve the problems of low detection efficiency and poor detection accuracy caused by defects too minor and too numerous types of defects, this paper proposes a real-time batch optical filter surface quality inspection method based on deep learning and image processing techniques. The first part proposes an optical filter surface defect detection and identification method for seven typical defects. A deep learning model is trained for defect detection and recognition by constructing a dataset. The second part uses image processing techniques to locate the accurate position of the defect, determine whether the defect is located within the effective aperture, and analyze the critical eigenvalue data of the defect. The experimental results show that the method improves productivity and product quality and reduces the manual workload by 90%. The proposed model and method also compare the results of surface defect detection with the actual measurement data in the field, verifying that the method has good recognition accuracy while improving efficiency.
光学滤波器是许多光学仪器的重要组成部分之一,用于选择光学器件的特定辐射波段。为确保仪器正常运行,对光学滤波器的表面质量有相关规范要求。当前研究中提到的用于检测光学滤波器表面质量的传统机器学习技术主要依赖于特征数据的人工提取,这限制了它们检测具有多种缺陷的光学滤波器表面的能力。为了解决因缺陷过小以及缺陷类型过多导致检测效率低和检测精度差的问题,本文提出了一种基于深度学习和图像处理技术的实时批量光学滤波器表面质量检测方法。第一部分针对七种典型缺陷提出了一种光学滤波器表面缺陷检测与识别方法。通过构建数据集训练深度学习模型进行缺陷检测与识别。第二部分运用图像处理技术定位缺陷的准确位置,确定缺陷是否位于有效孔径内,并分析缺陷的关键特征值数据。实验结果表明,该方法提高了生产效率和产品质量,将人工工作量减少了90%。所提出的模型和方法还将表面缺陷检测结果与现场实际测量数据进行了比较,验证了该方法在提高效率的同时具有良好的识别精度。