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基于目标散斑图案的表面粗糙度测量的矩阵分解法

Objective speckle pattern-based surface roughness measurement using matrix factorization.

作者信息

Patil Shanta Hardas, Kulkarni Rishikesh

出版信息

Appl Opt. 2022 Nov 10;61(32):9674-9684. doi: 10.1364/AO.473076.

DOI:10.1364/AO.473076
PMID:36606908
Abstract

A method for the measurement of profile parameters of both isotropic and anisotropic surfaces is presented using the objective laser speckle imaging technique. The surface parameters are characterized in terms of a singular value decomposition method-based metric derived from the initial key contributing singular values of the speckle pattern. A simulation study is performed with random Gaussian anisotropic surfaces generated as a function of the correlation lengths in both and directions. In the experimental demonstration, the proposed method is verified with metallic samples having distinct surface roughness processed through widely used machining operations viz., vertical milling, and grinding. A brief discussion about the extent to which the minimum number of singular values that are sufficient to evaluate the profile parameters in the context of experimental results is provided. The method supports the measurement of profile parameters of higher magnitude in the realm of non-contact topographic measurement techniques. The experimental results substantiate the practical applicability of the proposed method.

摘要

提出了一种使用客观激光散斑成像技术测量各向同性和各向异性表面轮廓参数的方法。表面参数通过基于奇异值分解方法的度量来表征,该度量源自散斑图案的初始关键贡献奇异值。对随x和y方向相关长度变化生成的随机高斯各向异性表面进行了模拟研究。在实验演示中,用通过广泛使用的加工操作(即立铣和磨削)加工的具有不同表面粗糙度的金属样品验证了所提出的方法。简要讨论了在实验结果的背景下足以评估轮廓参数的最小奇异值数量。该方法支持在非接触地形测量技术领域中测量更高量级的轮廓参数。实验结果证实了所提出方法的实际适用性。

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