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使用喷墨打印银薄膜的致裂应变传感器阵列,用于下垫板和非中心力感应应用。

Crack-inducing Strain Sensor Array using Inkjet-Printed Silver Thin Film for Underplate and Off-centered Force Sensing Applications.

机构信息

Department of Electrical and Computer Engineering, Inter-University Semiconductor Research Center (ISRC), Seoul National University, Seoul08826, Republic of Korea.

出版信息

ACS Appl Mater Interfaces. 2023 Jan 25;15(3):4487-4494. doi: 10.1021/acsami.2c19372. Epub 2023 Jan 15.

Abstract

The change in resistance upon bending in metal films as thick as 1 mm used for underpanel force touch applications is limited by the low sensitivity, thus requiring high-performance readout circuitry. In this paper, we report inkjet-printed silver thin films having crack-inducing underlayers, which further increases the sensitivity of their resistance changes under deformation. This allows for detecting weak vertical forces even through the plates (force-receiving layer), such as 0.4 or 1.2 mm thick polyethylene terephthalate or 0.4 mm thick glass. The underplate sensors will detect a force level as low as 10 gf, which corresponds to the amount of force required for fingerprint recognition. Furthermore, such highly sensitive strain sensors can potentially solve the inaccuracy issue of wearable devices, which can occur when misplaced sensors detect relatively weak biosignals, such as heart rate and blood pressure. The sensor detects the accurate pulse patterns of the wrist artery even though it is off-centered from the artery by 6 mm or larger. The crack-based strain sensor and its usage as a hidden underplate force sensing device will create various wearable and user-machine interface applications.

摘要

厚度为 1 毫米的金属薄膜在用于底层压力触摸应用时,其弯曲电阻变化受到低灵敏度的限制,因此需要高性能的读出电路。在本文中,我们报告了喷墨打印的具有诱导裂纹底层的银薄膜,这进一步提高了其在变形下电阻变化的灵敏度。这使得即使通过厚度为 0.4 或 1.2 毫米的聚对苯二甲酸乙二醇酯或 0.4 毫米厚的玻璃等板材(受力层)也能检测到微弱的垂直力。底层传感器可以检测到低至 10 gf 的力水平,这相当于指纹识别所需的力。此外,这种高灵敏度的应变传感器可以潜在地解决可穿戴设备的不准确性问题,当错位的传感器检测到相对较弱的生物信号,如心率和血压时,就会出现这种问题。即使传感器偏离动脉 6 毫米或更大,它也能检测到手腕动脉的准确脉搏模式。基于裂纹的应变传感器及其作为隐藏底层压力感应装置的使用将创造各种可穿戴和人机界面应用。

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