Li Feitao, Wan Siyao, Wang Dong, Schaaf Peter
Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro- and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Straße 5, 98693 Ilmenau, Germany.
Beilstein J Nanotechnol. 2023 Jan 20;14:133-140. doi: 10.3762/bjnano.14.14. eCollection 2023.
This work reports the formation of nanoflowers after annealing of Au/Ni bilayers deposited on SiO/Si substrates. The cores of the nanoflowers consist of segregated Ni silicide and Au parts and are surrounded by SiO branches. The SiO decomposition is activated at 1050 °C in a reducing atmosphere, and it can be enhanced more by Au compared to Ni. SiO gas from the decomposition of SiO and the active oxidation of Si is the source of Si for the growth of the SiO branches of the nanoflowers. The concentration of SiO gas around the decomposition cavities is inhomogeneously distributed. Closer to the cavity border, the concentration of the Si sources is higher, and SiO branches grow faster. Hence, nanoflowers present shorter and shorter branches as they are getting away from the border. However, such inhomogeneous SiO gas concentration is weakened in the sample with the highest Au concentration due to the strong ability of Au to enhance SiO decomposition, and nanoflowers with less difference in their branches can be observed across the whole sample.
这项工作报道了在SiO/Si衬底上沉积的Au/Ni双层膜退火后形成纳米花的情况。纳米花的核心由分离的硅化镍和金部分组成,并被SiO分支包围。SiO的分解在1050℃的还原气氛中被激活,与Ni相比,Au能更有效地促进其分解。SiO分解产生的SiO气体以及Si的活性氧化是纳米花SiO分支生长的Si源。分解腔周围SiO气体的浓度分布不均匀。靠近腔边界处,Si源的浓度较高,SiO分支生长得更快。因此,纳米花离边界越远,其分支就越短。然而,由于Au增强SiO分解的能力很强,在Au浓度最高的样品中,这种不均匀的SiO气体浓度会减弱,在整个样品中可以观察到分支差异较小的纳米花。