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用于垂直-横向双峰原子力显微镜的带有长探针的qPlus传感器的基模和高阶本征模。

Fundamental and higher eigenmodes of qPlus sensors with a long probe for vertical-lateral bimodal atomic force microscopy.

作者信息

Yamada Yuya, Ichii Takashi, Utsunomiya Toru, Kimura Kuniko, Kobayashi Kei, Yamada Hirofumi, Sugimura Hiroyuki

机构信息

Department of Materials Science and Engineering, Kyoto University Yoshida Honmachi, Sakyo Kyoto 606-8501 Japan

Department of Electronic Science and Engineering, Kyoto University Katsura, Nishikyo Kyoto 615-8510 Japan.

出版信息

Nanoscale Adv. 2022 Dec 26;5(3):840-850. doi: 10.1039/d2na00686c. eCollection 2023 Jan 31.

Abstract

The detection of vertical and lateral forces at the nanoscale by atomic force microscopy (AFM) reveals various mechanical properties on surfaces. The qPlus sensor is a widely used force sensor, which is built from a quartz tuning fork (QTF) and a sharpened metal probe, capable of high-resolution imaging in viscous liquids such as lubricant oils. Although a simultaneous detection technique of vertical and lateral forces by using a qPlus sensor is required in the field of nanotribology, it has still been difficult because the torsional oscillations of QTFs cannot be detected. In this paper, we propose a method to simultaneously detect vertical and lateral force components by using a qPlus sensor with a long probe. The first three eigenmodes of the qPlus sensor with a long probe are theoretically studied by solving a set of equations of motion for the QTF prong and probe. The calculation results were in good agreement with the experimental results. It was found that the tip oscillates laterally in the second and third modes. Finally, we performed friction anisotropy measurements on a polymer film by using a bimodal AFM utilizing the qPlus sensor with a long probe to confirm the lateral force detection.

摘要

通过原子力显微镜(AFM)在纳米尺度上检测垂直力和侧向力,可以揭示表面的各种机械性能。qPlus传感器是一种广泛使用的力传感器,它由石英音叉(QTF)和尖锐的金属探针组成,能够在诸如润滑油等粘性液体中进行高分辨率成像。尽管在纳米摩擦学领域需要一种使用qPlus传感器同时检测垂直力和侧向力的技术,但由于无法检测QTF的扭转振荡,这仍然很困难。在本文中,我们提出了一种使用带有长探针的qPlus传感器同时检测垂直力和侧向力分量的方法。通过求解一组关于QTF叉臂和探针的运动方程,从理论上研究了带有长探针的qPlus传感器的前三个本征模式。计算结果与实验结果吻合良好。发现尖端在第二和第三模式下横向振荡。最后,我们使用配备有长探针的qPlus传感器的双峰AFM对聚合物薄膜进行了摩擦各向异性测量,以确认侧向力检测。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/fdc0/9890686/87539b1b44f4/d2na00686c-f1.jpg

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