Lorusso Antonella, Kovács Zsolt, Gilicze Barnabás, Szatmári Sándor, Perrone Alessio, Szörényi Tamás
Department of Mathematics and Physics "E. De Giorgi", University of Salento and National Institute of Nuclear Physics, 73100 Lecce, Italy.
Department of High Energy Experimental Particle and Heavy Ion Physics, Wigner Research Centre for Physics, H-1121 Budapest, Hungary.
Materials (Basel). 2023 Feb 2;16(3):1267. doi: 10.3390/ma16031267.
Copper thin films are intended to serve as a cover layer of photocathodes that are deposited by ablating copper targets in a high vacuum by temporally clean 600 fs laser pulses at 248 nm. The extremely forward-peaked plume produced by the ultrashort UV pulses of high-energy contrast ensures fast film growth. The deposition rate, defined as peak thickness per number of pulses, rises from 0.03 to 0.11 nm/pulse with an increasing ablated area while keeping the pulse energy constant. The material distribution over the surface-to-be-coated can also effectively be controlled by tuning the dimensions of the ablated area: surface patterning from airbrush-like to broad strokes is available. The well-adhering films of uniform surface morphology consist of densely packed lentil-like particles of several hundred nm in diameter and several ten nm in height. Task-optimized ultrashort UV laser deposition is thereby an effective approach for the production of thin film patterns of predetermined geometry, serving e.g., as critical parts of photocathodes.
铜薄膜旨在用作光电阴极的覆盖层,该光电阴极是通过在高真空中用248nm的600fs激光脉冲对铜靶进行烧蚀而沉积的。高能对比度的超短紫外脉冲产生的极向前峰化羽流确保了薄膜的快速生长。沉积速率定义为每个脉冲的峰值厚度,在保持脉冲能量恒定的情况下,随着烧蚀面积的增加,沉积速率从0.03nm/脉冲增加到0.11nm/脉冲。通过调整烧蚀区域的尺寸,也可以有效地控制待涂覆表面上的材料分布:可以实现从喷枪状到宽笔触的表面图案化。表面形态均匀且附着力良好的薄膜由直径数百纳米、高度数十纳米的紧密堆积的扁豆状颗粒组成。因此,任务优化的超短紫外激光沉积是一种生产预定几何形状薄膜图案的有效方法,例如用作光电阴极的关键部件。