Grenadyorov Alexander, Oskirko Vladimir, Zakharov Alexander, Oskomov Konstantin, Rabotkin Sergey, Semenov Vyacheslav, Solovyev Andrey, Shmakov Alexander
The Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, Russia.
Budker Institute of Nuclear Physics SB RAS, 11, Acad. Lavrentieva Pr., 630090 Novosibirsk, Russia.
Materials (Basel). 2023 Feb 5;16(4):1348. doi: 10.3390/ma16041348.
The paper focuses on the dual high-power impulse magnetron sputtering of TiAlN coatings using short pulses of high power delivered to the target. The surface morphology, elemental composition, phase composition, hardness, wear resistance, and adhesive strength of TiAlN coatings with different Al contents were investigated on WC-Co substrates. The heat resistance of the TiAlN coating was determined with synchrotron X-ray diffraction. The hardness of the TiAlN coating with a low Al content ranged from 17 to 30 GPa, and its wear rate varied between 1.8∙10 and 4.9∙10 mm·N·m depending on the substrate bias voltage. The HF1-HF2 adhesion strength of the TiAlN coatings was evaluated with the Daimler-Benz Rockwell C test. The hardness and wear rate of the TiAlN coating were 26.5 GPa and 5.2∙10 mm·N·m, respectively. The annealing process at 700 °C considerably worsened the mechanical properties of the TiAlN coating, in contrast to the TiAlN coating, which manifested a high oxidation resistance at annealing temperatures of 940-950 °C.
本文重点研究了利用施加到靶材的短脉冲高功率对TiAlN涂层进行双高功率脉冲磁控溅射。在WC-Co基体上研究了不同Al含量的TiAlN涂层的表面形貌、元素组成、相组成、硬度、耐磨性和结合强度。用同步加速器X射线衍射测定了TiAlN涂层的耐热性。低Al含量的TiAlN涂层硬度范围为17至30 GPa，其磨损率根据基体偏压在1.8×10至4.9×10 mm·N·m之间变化。用戴姆勒-奔驰洛氏C试验评估了TiAlN涂层的HF1-HF2结合强度。TiAlN涂层的硬度和磨损率分别为26.5 GPa和5.2×10 mm·N·m。与在940-950℃退火温度下表现出高抗氧化性的TiAlN涂层相比，700℃的退火过程大大恶化了TiAlN涂层的力学性能。
