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基于微纳光捕获结构的 CuSCN/Si 异质结近红外光电探测器。

CuSCN/Si heterojunction near-infrared photodetector based on micro/nano light-trapping structure.

机构信息

College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Jiangjun Avenue, Nanjing 211106, People's Republic of China.

Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering, Changzhou University, Changzhou, 213164, People's Republic of China.

出版信息

Nanotechnology. 2023 Mar 20;34(23). doi: 10.1088/1361-6528/acc039.

Abstract

In this paper, high-performance CuSCN/Si heterojunction near-infrared photodetectors were successfully prepared using nanoscale light-trapping optical structures. Various light-trapping structures of ortho-pyramids, inverted pyramids and silicon nanowires were prepared on silicon substrates. Then, CuSCN films were spin-coated on silicon substrates with high crystalline properties for the assembly of CuSCN/Si photodetectors. Their reflectance spectra and interfacial passivation properties were characterized, demonstrating their superiority of light-trapping structures in high light response. Under the irradiation of 980 nm near-infrared light, a maximum responsivity of 2.88 A Wat -4 V bias and a specific detectivity of 5.427 × 10Jones were obtained in the CuSCN/Si heterojunction photodetectors prepared on planner silicon due to 3.6 eV band gap of CuSCN. The substrates of the light-trapping structure were then applied to the CuSCN/Si heterojunction photodetectors. A maximum responsivity of 10.16 A Wand a maximum specific detectivity of 1.001 × 10Jones were achieved under the 980 nm near-infrared light irradiation and -4 V bias, demonstrating the advanced performance of CuSCN/Si heterojunction photodetectors with micro-nano light-trapping substrates in the field of near-infrared photodetection compared to other silicon-based photodetectors.

摘要

本文采用纳米级光捕获光学结构成功制备了高性能的 CuSCN/Si 异质结近红外光电探测器。在硅衬底上制备了正四面体、倒金字塔和硅纳米线等各种光捕获结构,然后在具有高结晶性能的硅衬底上旋涂了 CuSCN 薄膜,用于组装 CuSCN/Si 光电探测器。对其反射率谱和界面钝化特性进行了表征,证明了其光捕获结构在高光响应方面的优越性。在 980nm 近红外光照射下,由于 CuSCN 的 3.6eV 带隙,在平面硅上制备的 CuSCN/Si 异质结光电探测器的响应率最大为 2.88A Wat-4V 偏压,比探测率为 5.427×10Jones。然后将光捕获结构的衬底应用于 CuSCN/Si 异质结光电探测器。在 980nm 近红外光照射和-4V 偏压下,光电探测器的响应率最大为 10.16A Wat,比探测率最大为 1.001×10Jones,与其他基于硅的光电探测器相比,具有微纳光捕获衬底的 CuSCN/Si 异质结光电探测器在近红外光电探测领域具有先进的性能。

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