Institute of Physical and Theoretical Chemistry, Graz University of Technology, Graz, 8010, Austria.
Institute of Inorganic Chemistry, Graz University of Technology, Graz, 8010, Austria.
Adv Mater. 2023 Jun;35(25):e2211478. doi: 10.1002/adma.202211478. Epub 2023 May 2.
Micropatterning crystalline materials with oriented pores is necessary for the fabrication of devices with anisotropic properties. Crystalline and porous metal-organic frameworks (MOFs) are ideal materials as their chemical and structural mutability enables precise tuning of functional properties for applications ranging from microelectronics to photonics. Herein, a patternable oriented MOF film is designed: by using a photomask under X-ray exposure, the MOF film decomposes in the irradiated areas, remaining intact in the unexposed regions. The MOF film acts simultaneously as a resist and as functional porous material. While the heteroepitaxial growth from aligned Cu(OH) nanobelts is used to deposit oriented MOF films, the sensitivity to radiation is achieved by integrating a brominated dicarboxylate ligand (Br BDC) into a copper-based MOF Cu L DABCO (DABCO = 1,4-diazabicyclo[2.2.2]octane; L = BDC/Br BDC). The lithographed samples act as diffraction gratings upon irradiation with a laser, thus confirming the quality of the extended MOF micropattern. Furthermore, the oriented MOF patterns are functionalized with fluorescent dyes. As a result, by rotating the polarization angle of the laser excitation, the alignment of the dye in the MOF is demonstrated. By controlling the functional response to light, this MOF patterning protocol can be used for the microfabrication of optical components for photonic devices.
用具有取向孔的微图案化晶体材料对于制造具有各向异性性质的器件是必要的。结晶和多孔金属有机骨架(MOF)是理想的材料,因为它们的化学和结构可变性能够精确调整功能特性,适用于从微电子学到光子学的各种应用。在本文中,设计了一种可图案化的取向 MOF 膜:通过在 X 射线照射下使用光掩模,MOF 膜在照射区域分解,而在未暴露区域保持完整。MOF 膜同时充当抗蚀剂和功能多孔材料。虽然通过对齐的 Cu(OH)纳米带的异质外延生长来沉积取向 MOF 膜,但通过将溴化二羧酸酯配体(Br BDC)整合到基于铜的 MOF Cu L DABCO(DABCO=1,4-二氮杂双环[2.2.2]辛烷;L=BDC/Br BDC)中实现对辐射的敏感性。经过激光照射后,光刻样品作为衍射光栅,从而证实了扩展 MOF 微图案的质量。此外,取向 MOF 图案用荧光染料进行功能化。结果,通过旋转激光激发的偏振角,证明了 MOF 中染料的取向。通过控制对光的功能响应,可以使用这种 MOF 图案化方案来制造用于光子器件的光组件的微制造。