European Commission - Joint Research Centre Karlsruhe, P.O. Box 2340, D-76125 Karlsruhe, Germany.
European Commission - Joint Research Centre Karlsruhe, P.O. Box 2340, D-76125 Karlsruhe, Germany.
Micron. 2023 May;168:103445. doi: 10.1016/j.micron.2023.103445. Epub 2023 Mar 17.
Crystallographic orientation dependence deteriorates the performance of surface analysis methods such as secondary ion mass spectrometry (SIMS) and focused ion beam (FIB). This study explores the corresponding potential challenges of laser ablation (LA) as a powerful sampling tool for inductively coupled plasma-mass spectrometry (ICP-MS). To this end, three UO single crystals of different orientation as well as polycrystalline UO were produced and characterized. Subsequently, a ns-laser ablation system was employed to study laser-matter interaction in detail. Firing the laser continuously at 1 Hz with various single shot fluence (2, 4, 6, 8, 12 J cm) for diverse periods created LA craters impacted by cumulative fluence between 50 and 650 J cm. Repeated LA experiments on the (100) plane of a UO single crystal at the beginning and end of the entire study revealed highly reproducible (<3%) LA rates, only limited by the fluctuation of the laser energy output of the ns-LA system. After thorough cleaning of the ablated samples, surface roughness and average depth of LA craters were determined using confocal laser scanning profilometry. Both LA rate and average depth of craters decreased exponentially with increasing single shot fluence independently of the crystal orientation. Surface roughness increased linearly with increasing cumulative fluence having largest intensification for lowest single shot fluence. Scanning electron microscope (SEM) images not only revealed the conical silhouette of LA craters, but also identified a convex meniscus at its bottom. This particular shape of the crater bottom with a deeper ring surrounding the central region is a result of melted and re-solidified UO generated during the LA process and the main limiting factor for the achievable depth resolution. The rapid re-solidification of the liquid phase after each single laser shot created tiles of different shape and orientation, depending on UO crystal orientation. Three different types of ejected particles radially distributed around the LA craters were identified by SEM, providing profound insights into laser-UO interaction.
晶体取向依赖性会降低表面分析方法(如二次离子质谱 (SIMS) 和聚焦离子束 (FIB))的性能。本研究探讨了激光烧蚀 (LA) 作为感应耦合等离子体质谱 (ICP-MS) 强大采样工具的相应潜在挑战。为此,制备并表征了三种不同取向的 UO 单晶体和多晶 UO。随后,采用纳秒激光烧蚀系统详细研究了激光与物质的相互作用。以 1 Hz 的频率连续发射激光,单脉冲能量(2、4、6、8、12 J/cm)不同,持续时间不同,在不同的单脉冲能量下,激光烧蚀产生的熔融层厚度不同,累积能量在 50 至 650 J/cm 之间。在整个研究的开始和结束时,在 UO 单晶体的(100)晶面重复进行 LA 实验,发现 LA 速率具有高度可重复性(<3%),仅受纳秒 LA 系统激光能量输出波动的限制。彻底清洁烧蚀后的样品后,使用共聚焦激光扫描轮廓仪确定表面粗糙度和 LA 坑的平均深度。LA 速率和坑的平均深度均随单脉冲能量的增加呈指数下降,而与晶体取向无关。表面粗糙度随累积能量的增加呈线性增加,而在最低单脉冲能量下,增加幅度最大。扫描电子显微镜 (SEM) 图像不仅揭示了 LA 坑的圆锥形轮廓,还在其底部识别出凸形弯月面。这种具有围绕中心区域较深环的凹坑底部的特殊形状是 LA 过程中产生的熔融和再凝固 UO 的结果,也是实现可达到的深度分辨率的主要限制因素。每次单激光脉冲后液相的快速再凝固会根据 UO 晶体取向形成不同形状和取向的瓦片。通过 SEM 鉴定出以 LA 坑为中心呈放射状分布的三种不同类型的喷射颗粒,深入了解了激光与 UO 的相互作用。