Appl Opt. 2023 Mar 1;62(7):B25-B34. doi: 10.1364/AO.476549.
The nodular defect shape and the laser incidence angle have a dramatic impact on the spatial distribution of light intensification within the nodule as well as how the laser light is drained from the defect. Nodular defect geometries unique to ion beam sputtering, ion-assisted deposition, and electron-beam (e-beam) deposition, respectively, are modeled in this parametric study over a wide range of nodular inclusion diameters and layer count for optical interference mirror coatings constructed with quarter-wave thicknesses and capped with a half wave of the low index material. It was found for hafnia (=1.9) and silica (=1.45) multilayer mirrors that the light intensification in nodular defects with a factor of 8, typical of e-beam deposited coatings deposited with a wide range of deposition angles, was maximized for a 24-layer design. For intermediate size inclusion diameters, increasing the layer count for normal incidence multilayer mirrors reduced the light intensification within the nodular defect. A second parametric study explored the impact of the nodule shape on the light intensification for a fixed number of layers. In this case, there is a strong temporal trend for the different nodule shapes. Narrow nodules tend to drain more laser energy through the bottom of the nodule into the substrate while wide nodules tend to drain more laser energy through the top of the nodule when irradiated at normal incidence. At a 45° incidence angle, waveguiding is an additional method to drain laser energy from the nodular defect. Finally, laser light resonates within nodular defects longer than within the adjacent nondefective multilayer structure.
结节状缺陷的形状和激光入射角对结节内光强的空间分布以及激光从缺陷中排出的方式有显著影响。本参数研究分别针对离子束溅射、离子辅助沉积和电子束(e-beam)沉积所特有的结节状缺陷几何形状,在广泛的结节状夹杂直径和层数以光学干涉镜涂层为模型,这些涂层的厚度为四分之一波长,并以低折射率材料的半波长为上限。对于具有 8 倍放大率的铪(=1.9)和二氧化硅(=1.45)多层镜,对于沉积角范围很宽的 e-beam 沉积涂层,24 层设计使结节状缺陷中的光增强达到最大值。对于中等尺寸夹杂直径,增加正入射多层镜的层数会降低结节状缺陷内的光增强。第二项参数研究探讨了固定层数的结节形状对光增强的影响。在这种情况下,不同结节形状存在很强的时间趋势。窄结节往往通过结节底部将更多的激光能量排入基底,而宽结节在正入射时往往通过结节顶部将更多的激光能量排入基底。在 45°入射角下,波导是从结节缺陷中排出激光能量的另一种方法。最后,激光在结节缺陷内的谐振时间比在相邻的无缺陷多层结构内长。