Zhao Huan, Zheng Chuantao, Pi Mingquan, Liang Lei, Song Fang, Zheng Kaiyuan, Zhang Yu, Wang Yiding, Tittel Frank K
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Spectrochim Acta A Mol Biomol Spectrosc. 2023 Dec 5;302:123020. doi: 10.1016/j.saa.2023.123020. Epub 2023 Jun 19.
SU8 is a cost-effective polymer material that is highly suitable for large-scale fabrication of waveguides. However, it has not been employed for on-chip gas measurement utilizing infrared absorption spectroscopy. In this study, we propose a near-infrared on-chip acetylene (CH) sensor using SU8 polymer spiral waveguides for the first time to our knowledge. The performance of the sensor based on wavelength modulation spectroscopy (WMS) was experimentally validated. By incorporating the proposed Euler-S bend and Archimedean spiral SU8 waveguide, we achieved a reduction in the sensor's size by over fifty percent. Leveraging the WMS technique, we evaluated the CH sensing performance at 1532.83 nm for SU8 waveguides of lengths 7.4 cm and 13 cm. The limit of detection (LoD) values were 2197.1 ppm (parts per million) and 425.5 ppm, respectively, with an averaging time of 0.2 s. Furthermore, the experimentally obtained optical power confinement factor (PCF) closely approximated the simulated value, with a value of 0.0172 compared to the simulated value of 0.016. The waveguide loss is measured to be 3 dB/cm. The rise time and fall time were approximately 2.05 s and 3.27 s, respectively. This study concludes that the SU8 waveguide exhibits significant potential for high-performance on-chip gas sensing in the near-infrared wavelength range.
SU8是一种性价比高的聚合物材料，非常适合大规模制造波导。然而，它尚未用于利用红外吸收光谱进行片上气体测量。在本研究中，据我们所知，首次提出了一种使用SU8聚合物螺旋波导的近红外片上乙炔（CH）传感器。基于波长调制光谱（WMS）的传感器性能通过实验得到了验证。通过采用所提出的欧拉 - S形弯曲和阿基米德螺旋SU8波导，我们将传感器尺寸减小了超过50%。利用WMS技术，我们评估了长度为7.4厘米和13厘米的SU8波导在1532.83纳米处的CH传感性能。检测限（LoD）值分别为2197.1 ppm（百万分之一）和425.5 ppm，平均时间为0.2秒。此外，实验获得的光功率限制因子（PCF）与模拟值非常接近，实验值为0.0172，模拟值为0.016。测量得到的波导损耗为3 dB/cm。上升时间和下降时间分别约为2.05秒和3.27秒。本研究得出结论，SU8波导在近红外波长范围内具有用于高性能片上气体传感的巨大潜力。
