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封装衍射光学元件的注塑成型

Injection Molding of Encapsulated Diffractive Optical Elements.

作者信息

Wagner Stefan, Treptow Kevin, Weser Sascha, Drexler Marc, Sahakalkan Serhat, Eberhardt Wolfgang, Guenther Thomas, Pruss Christof, Herkommer Alois, Zimmermann André

机构信息

Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany.

Institute for Micro Integration (IFM), Faculty 7-Engineering Design, Production Engineering and Automotive Engineering, University of Stuttgart, Allmandring 9B, 70569 Stuttgart, Germany.

出版信息

Micromachines (Basel). 2023 Jun 9;14(6):1223. doi: 10.3390/mi14061223.

Abstract

Microstructuring techniques, such as laser direct writing, enable the integration of microstructures into conventional polymer lens systems and may be used to generate advanced functionality. Hybrid polymer lenses combining multiple functions such as diffraction and refraction in a single component become possible. In this paper, a process chain to enable encapsulated and aligned optical systems with advanced functionality in a cost-efficient way is presented. Within a surface diameter of 30 mm, diffractive optical microstructures are integrated in an optical system based on two conventional polymer lenses. To ensure precise alignment between the lens surfaces and the microstructure, resist-coated ultra-precision-turned brass substrates are structured via laser direct writing, and the resulting master structures with a height of less than 0.002 mm are replicated into metallic nickel plates via electroforming. The functionality of the lens system is demonstrated through the production of a zero refractive element. This approach provides a cost-efficient and highly accurate method for producing complicated optical systems with integrated alignment and advanced functionality.

摘要

微结构化技术,如激光直写技术,能够将微结构集成到传统聚合物透镜系统中,并可用于实现先进功能。在单个组件中结合衍射和折射等多种功能的混合聚合物透镜成为可能。本文提出了一种工艺链,能够以经济高效的方式实现具有先进功能的封装和对准光学系统。在30毫米的表面直径范围内,衍射光学微结构被集成到基于两个传统聚合物透镜的光学系统中。为确保透镜表面与微结构之间的精确对准,通过激光直写对涂有光刻胶的超精密车削黄铜基板进行结构化处理,然后通过电铸将高度小于0.002毫米的所得母版结构复制到金属镍板中。通过生产零折射元件展示了透镜系统的功能。这种方法为生产具有集成对准和先进功能的复杂光学系统提供了一种经济高效且高精度的方法。

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