School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.
Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing 314019, China.
Sci Adv. 2023 Jul 14;9(28):eadg7827. doi: 10.1126/sciadv.adg7827. Epub 2023 Jul 12.
Colloidal quantum dot (CQD)-based photodetectors are promising alternatives to bulk semiconductor-based detectors to be monolithically integrated with complementary metal-oxide semiconductor readout integrated circuits avoiding high-cost epitaxial growth methods and complicated flip-bonding processes. To date, photovoltaic (PV) single-pixel detectors have led to the best performance with background-limit infrared photodetection performance. However, the nonuniform and uncontrollable doping methods and complex device configuration restrict the focal plane array (FPA) imagers to operate in PV mode. Here, we propose a controllable in situ electric field-activated doping method to construct lateral p-n junctions in the short-wave infrared (SWIR) mercury telluride (HgTe) CQD-based photodetectors with a simple planar configuration. The planar p-n junction FPA imagers with 640 × 512 pixels (15-μm pixel pitch) are fabricated and exhibit substantially improved performance compared with photoconductor imagers before activation. High-resolution SWIR infrared imaging is demonstrated with great potential for various applications including semiconductor inspection, food safety, and chemical analysis.
基于胶体量子点 (CQD) 的光电探测器是替代体半导体探测器的有前途的选择,可以与互补金属氧化物半导体读出集成电路单片集成,避免使用昂贵的外延生长方法和复杂的倒装键合工艺。迄今为止,光伏 (PV) 单像素探测器在背景限红外光电探测性能方面取得了最佳性能。然而,不均匀和不可控的掺杂方法以及复杂的器件结构限制了焦平面阵列 (FPA) 成像仪以光伏模式运行。在这里,我们提出了一种可控制的原位电场激活掺杂方法,用于在具有简单平面结构的短波长红外 (SWIR) 汞碲化物 (HgTe) CQD 光电探测器中构建横向 p-n 结。制造了具有 640×512 像素(15-μm 像素间距)的平面 p-n 结 FPA 成像仪,与激活前的光电导成像仪相比,其性能有了显著提高。高分辨率 SWIR 红外成像具有很大的应用潜力,包括半导体检测、食品安全和化学分析。