磁悬浮涡轮分子泵的现场动平衡。

Field Dynamic Balancing for Magnetically Suspended Turbomolecular Pump.

机构信息

Aeronautics Engineering School, Air Force Engineering University, Xi'an 710038, China.

Science and Technology on Space Physics Laboratory, Beijing 100076, China.

出版信息

Sensors (Basel). 2023 Jul 5;23(13):6168. doi: 10.3390/s23136168.

DOI:10.3390/s23136168

PMID:37448017

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10346660/

Abstract

A field dynamic balancer is crucial to the applications of magnetically suspended turbomolecular pumps. Therefore, this paper presents a novel field dynamic balancing method based on autocentering control mode without any additional instrumentation. Firstly, the dynamics of the active magnetic bearing rotor system with unbalance are modeled. Through model analysis, it was found that making the rotor rotate around the geometric axis can improve the accuracy of dynamic balancing. Secondly, the relationship between the correcting masses and the synchronous currents based on the influence coefficient method is established. Then, an autocentering controller is designed to make the rotor rotate around the geometric axis. The synchronous currents can be detected and extracted by the current transducers to calculate the unbalance correction mass. Finally, the experimental results show that this novel field dynamic balancing method can effectively eliminate the majority of rotor unbalance. Compared with the original unbalance of a rotor, the synchronous current in the A-end has been reduced by 71.4% and the synchronous current in the B-end, by 90.8% with the proposed method.

摘要

磁场悬浮涡轮分子泵的应用离不开现场动平衡技术。因此，本文提出了一种新颖的现场动平衡方法，该方法基于自定心控制模式，无需任何附加仪器。首先，建立了存在不平衡量的主动磁悬浮轴承转子系统动力学模型。通过模型分析发现，使转子绕几何轴旋转可以提高动平衡的精度。其次，基于影响系数法建立了校正质量与同步电流之间的关系。然后，设计了自定心控制器，使转子绕几何轴旋转。通过电流传感器检测和提取同步电流，可以计算出不平衡校正质量。最后，实验结果表明，这种新型现场动平衡方法可以有效地消除大部分转子不平衡量。与转子的原始不平衡相比，采用该方法后，A 端的同步电流降低了 71.4%，B 端的同步电流降低了 90.8%。