Sun Jia-Yuan, Nguyen Duc Huy, Liu Jia-Ming, Lo Chia-Yao, Ma Yuan-Ron, Chen Yi-Jia, Yi Jui-Yun, Huang Jian-Zhi, Giap Hien, Nguyen Hai Yen Thi, Liao Chun-Da, Lin Ming-Yi, Lai Chien-Chih
Department of Physics, National Dong Hwa University, Hualien, 974301, Taiwan.
Department of Electrical and Computer Engineering, University of California, Los Angeles, CA, 90095, USA.
Adv Sci (Weinh). 2023 Oct;10(28):e2301493. doi: 10.1002/advs.202301493. Epub 2023 Aug 9.
The metal-semiconductor heterojunction is imperative for the realization of electrically driven nanolasers for chip-level platforms. Progress in developing such nanolasers has hitherto rarely been realized, however, because of their complexity in heterojunction fabrication and the need to use noble metals that are incompatible with microelectronic manufacturing. Most plasmonic nanolasers lase either above a high threshold (10 -10 MW cm ) or at a cryogenic temperature, and lasing is possible only after they are removed from the substrate to avoid the large ohmic loss and the low modal reflectivity, making monolithic fabrication impossible. Here, for the first time, record-low-threshold, room-temperature ultraviolet (UV) lasing of plasmon-coupled core-shell nanowires that are directly grown on silicon is demonstrated. The naturally formed core-shell metal-semiconductor heterostructure of the nanowires leads to a 100-fold improvement in growth density over previous results. This unprecedentedly high nanowire density creates intense plasmonic resonance, which is outcoupled to the resonant Fabry-Pérot microcavity. By boosting the emission strength by a factor of 100, the hybrid photonic-plasmonic system successfully facilitates a record-low laser threshold of 12 kW cm with a spontaneous emission coupling factor as high as ≈0.32 in the 340-360 nm range. Such architecture is simple and cost-competitive for future UV sources in silicon integration.
金属 - 半导体异质结对于实现用于芯片级平台的电驱动纳米激光器至关重要。然而,由于异质结制造的复杂性以及需要使用与微电子制造不兼容的贵金属,迄今为止,开发此类纳米激光器的进展甚微。大多数等离子体纳米激光器要么在高阈值(10 -10 MW cm )以上激射,要么在低温下激射,并且只有在将它们从衬底上移除以避免大的欧姆损耗和低的模式反射率之后才可能激射,这使得单片制造成为不可能。在此,首次展示了直接生长在硅上的等离子体耦合核壳纳米线的创纪录低阈值室温紫外(UV)激射。纳米线自然形成的核壳金属 - 半导体异质结构导致生长密度比以前的结果提高了100倍。这种前所未有的高纳米线密度产生了强烈的等离子体共振,该共振被耦合到共振法布里 - 珀罗微腔中。通过将发射强度提高100倍,混合光子 - 等离子体系统成功实现了创纪录的低激光阈值12 kW cm ,在340 - 360 nm范围内自发发射耦合因子高达≈0.32。这种架构对于未来硅集成中的紫外光源来说简单且具有成本竞争力。