Ni Jing, Feng Yujie, Cui Zhi, He Lihua, Sun Jingbo
School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Materials (Basel). 2023 Jul 27;16(15):5289. doi: 10.3390/ma16155289.
Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. However, the dynamic performance of the spring is often affected by the operating frequency. This paper studied the effect of different working frequencies on the dynamic property of the spring through compression-cycle experiments under uniaxial sinusoidal excitation. The force-displacement curves under different compression frequencies were fitted to obtain the dynamic stiffness of the PFA spring under different cyclic loading frequencies. The variation in the spring's hysteresis coefficient was evaluated using the hysteresis curves of different cyclic loading conditions. After 2 million compression experiments, the changes in dynamic stiffness, hysteresis coefficient, and spring height were investigated. The obtained results revealed that, as the frequency increases, the dynamic stiffness of the spring increases. The hysteresis coefficient of the PFA spring is the largest at 10 Hz and the smallest at 6 Hz. Upon conducting 2 million compression tests, it was discovered that the dynamic stiffness experiences the greatest attenuation rate of 4.19% at a frequency of 8 Hz, whereas the hysteresis coefficient undergoes the largest attenuation of 42.1% at a frequency of 6 Hz. The results will help to improve the design and application level of PFA springs.
半导体清洗系统的超净流控泵是半导体行业中的关键设备。其中，全氟烷氧基烷烃（PFA）弹簧是控制泵的关键部件，其动态性能对于确保系统高效运行至关重要。然而，弹簧的动态性能常常受到工作频率的影响。本文通过在单轴正弦激励下的压缩循环实验，研究了不同工作频率对弹簧动态性能的影响。对不同压缩频率下的力-位移曲线进行拟合，以获得不同循环加载频率下PFA弹簧的动态刚度。利用不同循环加载条件下的滞后曲线评估弹簧滞后系数的变化。在进行200万次压缩实验后，研究了动态刚度、滞后系数和弹簧高度的变化。所得结果表明，随着频率增加，弹簧的动态刚度增大。PFA弹簧的滞后系数在10 Hz时最大，在6 Hz时最小。在进行200万次压缩测试后发现，动态刚度在8 Hz频率下的衰减率最大，为4.19%，而滞后系数在6 Hz频率下的衰减最大，为42.1%。这些结果将有助于提高PFA弹簧的设计和应用水平。
