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具有微嵌入式声学谐振器的高灵敏度光声气体传感器用于气体泄漏检测。

Highly sensitive photoacoustic gas sensor with micro-embedded acoustic resonator for gas leakage detection.

作者信息

Zhang Bo, Jia Yunjiang, Zhao Benlei, Zhu Xiaosong, Shi Yiwei

出版信息

Opt Lett. 2023 Aug 15;48(16):4201-4204. doi: 10.1364/OL.497052.

Abstract

In this work, a photoacoustic (PA) gas sensor with a micro-embedded acoustic resonator for gas leakage detection was demonstrated. The micro-embedded acoustic resonator was fabricated by putting a leaky hollow-core fiber (L-HCF) into a cylindrical buffer chamber. The L-HCF was utilized as the PA cavity and the light transmission media simultaneously. The optimal inner diameter of the L-HCF was 1.7 mm. The embedded acoustic resonator was experimentally proven to be equivalent to a T-type half-open acoustic resonator, but the structure became much more compact. The volume of the amount of gas in the cell was only ∼0.3 mL, and the gas diffusion time to fill the sensor under room temperature (25°C) and ambient pressure (101 kPa) was ∼44 s. Trace acetylene (CH) in pure nitrogen (N) was chosen as the target gas, and the minimum detectable limit (MDL) reached 29 ppb when the lock-in integration time was 1 s. The normalized noise equivalent absorption (NNEA) coefficient was calculated to be 3.0 × 10 W·cm·Hz. The micro-resonant PA gas sensor, with merits of compactness, low gas consumption, and low cost, has the potential to be a remote gas sensing scheme in fields of environmental protection, industrial process monitoring, and so on.

摘要

在这项工作中,展示了一种带有微嵌入式声学谐振器的光声(PA)气体传感器,用于气体泄漏检测。通过将泄漏型空心光纤(L-HCF)放入圆柱形缓冲腔中来制造微嵌入式声学谐振器。L-HCF 同时用作 PA 腔和光传输介质。L-HCF 的最佳内径为 1.7 毫米。实验证明,嵌入式声学谐振器等效于 T 型半开放式声学谐振器,但结构变得更加紧凑。传感器单元内气体的体积仅约为 0.3 mL,在室温(25°C)和环境压力(101 kPa)下填充传感器的气体扩散时间约为 44 秒。选择纯氮气(N₂)中的痕量乙炔(C₂H₂)作为目标气体,当锁相积分时间为 1 秒时,最低检测限(MDL)达到 29 ppb。计算得到归一化噪声等效吸收(NNEA)系数为 3.0×10⁻⁹ W·cm·Hz。这种微谐振 PA 气体传感器具有紧凑、低气体消耗和低成本的优点,有潜力成为环境保护、工业过程监测等领域的远程气体传感方案。

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