Yang Guiyang, Yan Hangrui, Liu Le, Wang Quanji, Chen Qiaodan, Xiong Wei, Deng Leimin, Liu Lei
Opt Lett. 2023 Sep 15;48(18):4733-4736. doi: 10.1364/OL.501322.
We report a laser adaptive processing technology (LAPT) for the selective removal of Cu/Al multilayer dissimilar materials. Using the wavelength range and intensity distribution of the characteristic spectrum, the properties and content of multilayer dissimilar materials can be analyzed online based on laser-induced breakdown spectroscopy. The traditional low-speed spectral detection mode was transformed into a high-speed photoelectric detection method by using a scheme consisting of a bandpass filter with an avalanche photodetector (APD), and the in situ online detection of a 30 ns, 40 kHz high-frequency pulse signal during laser scanning was realized. Combined with a field programmable gate array (FPGA) digital control unit, online feedback and closed-loop control were achieved at the kHz level, and the adaptive intelligent control of material interfaces and laser processing parameters was achieved. This excellently demonstrated the feasibility and flexibility of LAPT for processing arbitrary multilayer dissimilar materials.
我们报道了一种用于选择性去除铜/铝多层异种材料的激光自适应处理技术（LAPT）。利用特征光谱的波长范围和强度分布，基于激光诱导击穿光谱可在线分析多层异种材料的性质和成分。通过采用由带通滤波器与雪崩光电探测器（APD）组成的方案，将传统的低速光谱检测模式转变为高速光电检测方法，实现了激光扫描过程中30 ns、40 kHz高频脉冲信号的原位在线检测。结合现场可编程门阵列（FPGA）数字控制单元，在kHz级别实现了在线反馈和闭环控制，以及材料界面和激光加工参数的自适应智能控制。这出色地证明了LAPT用于加工任意多层异种材料的可行性和灵活性。
