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基于多层绝缘体上硅氮化物(SiN-on-SOI)平台的高能效偏振不敏感可调谐微环滤波器。

Power-efficient polarization-insensitive tunable microring filter on a multi-layer SiN-on-SOI platform.

作者信息

Li Xin, Lu Liangjun, Chen Jianping, Zhou Linjie

出版信息

Opt Lett. 2023 Sep 15;48(18):4861-4864. doi: 10.1364/OL.498636.

Abstract

We develop and demonstrate a non-duplicate polarization-diversity tunable bandpass optical filter by leveraging the bi-directional transmission of add-drop dual-coupled microring resonators (MRRs) on a multi-layer SiN-on-silicon-on-insulator (SOI) platform. By using Euler-bends, we implement compact and low-loss SiN MRRs with an equivalent bending radius of ∼38 µm. Fiber-to-fiber (on-chip) insertion loss of 4.3 dB (1.7 dB) with a low polarization-dependent loss of <0.5 dB and low differential group delay of <2.5 ps is achieved. The extinction ratio is more than 30 dB. The thermo-optic tuning efficiency of the SiN MRRs is improved with a suspended micro-heater design. As a result, a wavelength tuning range of ∼2 nm and a 3-dB bandwidth tuning range of 20 GHz are experimentally demonstrated. The tuning efficiency is 33 pm/mW, which is ∼7.5 times higher than the previous design. This reconfigurable polarization-insensitive filter, with low loss, low cross talk, and high power efficiency, is highly promising for practical applications in optical communication and signal processing.

摘要

我们通过利用绝缘体上硅上多层氮化硅(SiN-on-silicon-on-insulator,SOI)平台上的上下路双耦合微环谐振器(MRR)的双向传输,开发并展示了一种无重复的偏振分集可调谐带通光学滤波器。通过使用欧拉弯曲,我们实现了等效弯曲半径约为38 µm的紧凑且低损耗的SiN MRR。实现了光纤到光纤(片上)插入损耗为4.3 dB(1.7 dB),偏振相关损耗低至<0.5 dB,差分群延迟低至<2.5 ps。消光比超过30 dB。通过悬浮微加热器设计提高了SiN MRR的热光调谐效率。结果,通过实验证明了约2 nm的波长调谐范围和20 GHz的3 dB带宽调谐范围。调谐效率为33 pm/mW,比先前的设计高出约7.5倍。这种具有低损耗、低串扰和高功率效率的可重构偏振不敏感滤波器,在光通信和信号处理的实际应用中极具前景。

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