Ding Shanjun, Fang Zhidan, Yu Zhongyao, Wang Qidong
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.
ACS Omega. 2023 Aug 29;8(36):32907-32916. doi: 10.1021/acsomega.3c04371. eCollection 2023 Sep 12.
In general, although abundant literature studies are available on epoxy resin systems, a complete description of the curing kinetics in epoxy-cyanate ester composites relevant to the microelectronics industry is still lacking. Herein, curing behaviors of Ajinomoto build-up films, which are epoxy/silica composites, were studied by the non-isothermal differential scanning calorimetry method, and then, three non-isothermal curing kinetics models and model-free curing methods were used to analyze curing behaviors. In addition, a copper layer was also deposited onto the surface of the build-up film, and its interfacial adhesion property was also analyzed at different pre-curing conditions. The results showed that the curing reaction of the build-up film contains two curing reaction processes, and the first curing process is suited for the autocatalytic curing model, while the other curing process is suited for the Kamal curing kinetics model. Three model-free curing methods were used to calculate the activating energy at different degrees of curing, which indicated that the activating energy is variable during the whole curing process. The interfacial adhesion strength between the build-up film and copper layer decreased with the increase in the degree of curing, which is attributed to the contribution of mechanical anchoring. This work will offer guidance in curing behaviors for improving interfacial bonding force and controlling warpage behavior for chip substrates in the future.
一般来说,尽管关于环氧树脂体系有大量的文献研究,但对于与微电子行业相关的环氧 - 氰酸酯复合材料的固化动力学仍缺乏完整描述。在此,通过非等温差示扫描量热法研究了味之素积层膜(一种环氧/二氧化硅复合材料)的固化行为,然后使用三种非等温固化动力学模型和无模型固化方法来分析固化行为。此外,还在积层膜表面沉积了一层铜,并分析了在不同预固化条件下其界面粘附性能。结果表明,积层膜的固化反应包含两个固化反应过程,第一个固化过程适合自催化固化模型,而另一个固化过程适合卡马尔固化动力学模型。使用三种无模型固化方法计算了不同固化程度下的活化能,这表明在整个固化过程中活化能是可变的。积层膜与铜层之间的界面粘附强度随着固化程度的增加而降低,这归因于机械锚固作用。这项工作将为未来改善芯片基板的界面结合力和控制翘曲行为的固化行为提供指导。