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用于多模态掠入射X射线散射研究的原位旋转涂布机。

In situ spin coater for multimodal grazing incidence x-ray scattering studies.

作者信息

Coffey Aidan H, Slack Jonathan, Cornell Earl, Yang Lee L, Anderson Kevan, Wang Kang, Dou Letian, Zhu Chenhui

机构信息

Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.

Davidson School of Chemical Engineering, Purdue University, West Lafayette, Indiana 47907, USA.

出版信息

Rev Sci Instrum. 2023 Sep 1;94(9). doi: 10.1063/5.0159297.

Abstract

We present herein a custom-made, in situ, multimodal spin coater system with an integrated heating stage that can be programmed with spinning and heating recipes and that is coupled with synchrotron-based, grazing-incidence wide- and small-angle x-ray scattering. The spin coating system features an adaptable experimental chamber, with the ability to house multiple ancillary probes such as photoluminescence and visible optical cameras, to allow for true multimodal characterization and correlated data analysis. This system enables monitoring of structural evolutions such as perovskite crystallization and polymer self-assembly across a broad length scale (2 Å-150 nm) with millisecond temporal resolution throughout a complete thin film fabrication process. The use of this spin coating system allows scientists to gain a deeper understanding of temporal processes of a material system, to develop ideal conditions for thin film manufacturing.

摘要

我们在此展示一种定制的原位多模态旋涂系统,该系统带有集成加热台,可通过旋转和加热程序进行编程,并与基于同步加速器的掠入射广角和小角X射线散射联用。该旋涂系统的特点是具有一个适应性强的实验腔,能够容纳多个辅助探测器,如光致发光和可见光光学相机,以实现真正的多模态表征和相关数据分析。该系统能够在整个完整的薄膜制造过程中,以毫秒级的时间分辨率监测诸如钙钛矿结晶和聚合物自组装等结构演变,跨越很宽的长度尺度(2 Å - 150 nm)。使用这种旋涂系统使科学家能够更深入地了解材料系统的时间过程,从而为薄膜制造开发理想条件。

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