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用于薄膜原位掠入射X射线散射实验的模块化狭缝式涂布机。

Modular slot-die coater for in situ grazing-incidence x-ray scattering experiments on thin films.

作者信息

Reus Manuel A, Baier Thomas, Lindenmeir Christoph G, Weinzierl Alexander F, Buyan-Arivjikh Altantulga, Wegener Simon A, Kosbahn David P, Reb Lennart K, Rubeck Jan, Schwartzkopf Matthias, Roth Stephan V, Müller-Buschbaum Peter

机构信息

Technical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748 Garching, Germany.

Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany.

出版信息

Rev Sci Instrum. 2024 Apr 1;95(4). doi: 10.1063/5.0204673.

Abstract

Multimodal in situ experiments during slot-die coating of thin films pioneer the way to kinetic studies on thin-film formation. They establish a powerful tool to understand and optimize the formation and properties of thin-film devices, e.g., solar cells, sensors, or LED films. Thin-film research benefits from time-resolved grazing-incidence wide- and small-angle x-ray scattering (GIWAXS/GISAXS) with a sub-second resolution to reveal the evolution of crystal structure, texture, and morphology during the deposition process. Simultaneously investigating optical properties by in situ photoluminescence measurements complements in-depth kinetic studies focusing on a comprehensive understanding of the triangular interdependency of processing, structure, and function for a roll-to-roll compatible, scalable thin-film deposition process. Here, we introduce a modular slot-die coater specially designed for in situ GIWAXS/GISAXS measurements and applicable to various ink systems. With a design for quick assembly, the slot-die coater permits the reproducible and comparable fabrication of thin films in the lab and at the synchrotron using the very same hardware components, as demonstrated in this work by experiments performed at Deutsches Elektronen-Synchrotron (DESY). Simultaneous to GIWAXS/GISAXS, photoluminescence measurements probe optoelectronic properties in situ during thin-film formation. An environmental chamber allows to control the atmosphere inside the coater. Modular construction and lightweight design make the coater mobile, easy to transport, quickly extendable, and adaptable to new beamline environments.

摘要

在薄膜狭缝模涂覆过程中进行的多模态原位实验开创了薄膜形成动力学研究的先河。它们建立了一个强大的工具,用于理解和优化薄膜器件(如太阳能电池、传感器或LED薄膜)的形成和性能。薄膜研究受益于具有亚秒级分辨率的时间分辨掠入射广角和小角X射线散射(GIWAXS/GISAXS),以揭示沉积过程中晶体结构、织构和形态的演变。通过原位光致发光测量同时研究光学性质,补充了深入的动力学研究,重点是全面理解卷对卷兼容、可扩展的薄膜沉积过程中工艺、结构和功能的三角相互依存关系。在这里,我们介绍一种专门为原位GIWAXS/GISAXS测量设计的模块化狭缝模涂覆机,适用于各种油墨系统。通过快速组装设计,狭缝模涂覆机允许在实验室和同步加速器中使用完全相同的硬件组件可重复且可比地制造薄膜,如本工作在德国电子同步加速器(DESY)进行的实验所示。与GIWAXS/GISAXS同时,光致发光测量在薄膜形成过程中原位探测光电性质。一个环境室允许控制涂覆机内部的气氛。模块化结构和轻量化设计使涂覆机便于移动、易于运输、快速扩展并适应新的光束线环境。

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