Franke Jakub, Koutecký Tomáš, Koutný Daniel
Institute of Machine and Industrial Design, Faculty of Mechanical Engineering, Brno University of Technology, Technická 2896/2, 616 69 Brno, Czech Republic.
Materials (Basel). 2023 Sep 11;16(18):6165. doi: 10.3390/ma16186165.
This study compared eight sublimation scanning sprays in terms of their effect on 3D scanning results, coating thickness, and sublimation time. The work used an automated spraying system to ensure the same deposition conditions for all tested materials. All experiments were performed under the same environmental conditions to exclude the influence of the ambient environment on the coatings. All tested scanning sprays created coatings with thicknesses in the order of tens of micrometers that were detectable by the 3D scanner Atos III Triple Scan. The coatings must be applied carefully when accurate measurements are required. All used materials enabled the capture of the highly reflective surface of the Si-wafer. However, the differences between some sprays were significant. Sublimation time measurements showed that all coatings disappeared from the Si-wafer surface completely. Nevertheless, all coatings left visible traces on the mirror-like surface. They were easily wiped off with a cloth.
本研究比较了八种升华扫描喷雾在对三维扫描结果、涂层厚度和升华时间方面的影响。该工作使用了自动喷涂系统，以确保所有测试材料的沉积条件相同。所有实验均在相同的环境条件下进行，以排除环境对涂层的影响。所有测试的扫描喷雾所形成的涂层厚度均在几十微米量级，三维扫描仪Atos III Triple Scan能够检测到这些涂层。当需要进行精确测量时，必须小心地施加涂层。所有使用的材料都能够捕捉硅片的高反射表面。然而，一些喷雾之间的差异是显著的。升华时间测量表明，所有涂层都从硅片表面完全消失。尽管如此，所有涂层在镜面表面上都留下了可见的痕迹。用布很容易就可以擦掉这些痕迹。
