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柔性基板上喷墨打印有机压阻式触觉传感器的设计、制造与表征

Design, Fabrication, and Characterization of Inkjet-Printed Organic Piezoresistive Tactile Sensor on Flexible Substrate.

作者信息

Olowo Olalekan O, Harris Bryan, Sills Daniel, Zhang Ruoshi, Sherehiy Andriy, Tofangchi Alireza, Wei Danming, Popa Dan O

机构信息

Louisville Automation & Robotics Research Institute, University of Louisville, Louisville, KY 40208, USA.

出版信息

Sensors (Basel). 2023 Oct 6;23(19):8280. doi: 10.3390/s23198280.

DOI:10.3390/s23198280
PMID:37837110
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10575043/
Abstract

In this paper, we propose a novel tactile sensor with a "fingerprint" design, named due to its spiral shape and dimensions of 3.80 mm × 3.80 mm. The sensor is duplicated in a four-by-four array containing 16 tactile sensors to form a "SkinCell" pad of approximately 45 mm by 29 mm. The SkinCell was fabricated using a custom-built microfabrication platform called the NeXus which contains additive deposition tools and several robotic systems. We used the NeXus' six-degrees-of-freedom robotic platform with two different inkjet printers to deposit a conductive silver ink sensor electrode as well as the organic piezoresistive polymer PEDOT:PSS-Poly (3,4-ethylene dioxythiophene)-poly(styrene sulfonate) of our tactile sensor. Printing deposition profiles of 100-micron- and 250-micron-thick layers were measured using microscopy. The resulting structure was sintered in an oven and laminated. The lamination consisted of two different sensor sheets placed back-to-back to create a half-Wheatstone-bridge configuration, doubling the sensitivity and accomplishing temperature compensation. The resulting sensor array was then sandwiched between two layers of silicone elastomer that had protrusions and inner cavities to concentrate stresses and strains and increase the detection resolution. Furthermore, the tactile sensor was characterized under static and dynamic force loading. Over 180,000 cycles of indentation were conducted to establish its durability and repeatability. The results demonstrate that the SkinCell has an average spatial resolution of 0.827 mm, an average sensitivity of 0.328 mΩ/Ω/N, expressed as the change in resistance per force in Newtons, an average sensitivity of 1.795 µV/N at a loading pressure of 2.365 PSI, and a dynamic response time constant of 63 ms which make it suitable for both large area skins and fingertip human-robot interaction applications.

摘要

在本文中,我们提出了一种具有“指纹”设计的新型触觉传感器,因其螺旋形状和3.80毫米×3.80毫米的尺寸而得名。该传感器以4×4阵列进行复制,包含16个触觉传感器,形成一个尺寸约为45毫米×29毫米的“皮肤细胞”垫。“皮肤细胞”是使用一个名为NeXus的定制微制造平台制造的,该平台包含添加剂沉积工具和多个机器人系统。我们使用NeXus的六自由度机器人平台和两台不同的喷墨打印机来沉积导电银墨传感器电极以及我们触觉传感器的有机压阻聚合物PEDOT:PSS-聚(3,4-乙撑二氧噻吩)-聚(苯乙烯磺酸盐)。使用显微镜测量了100微米和250微米厚层的印刷沉积轮廓。所得结构在烤箱中烧结并层压。层压由两个背对背放置的不同传感器片组成,以形成半惠斯通电桥配置,使灵敏度加倍并实现温度补偿。然后将所得的传感器阵列夹在两层有机硅弹性体之间,这两层有机硅弹性体具有突起和内腔,以集中应力和应变并提高检测分辨率。此外,对触觉传感器在静态和动态力加载下进行了表征。进行了超过180,000次压痕循环以确定其耐久性和重复性。结果表明,“皮肤细胞”的平均空间分辨率为0.827毫米,平均灵敏度为0.328毫欧/欧/牛,以每牛顿力引起的电阻变化表示,在2.365磅力/平方英寸的加载压力下平均灵敏度为1.795微伏/牛,动态响应时间常数为63毫秒,这使其适用于大面积皮肤和指尖人机交互应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/e9cb3df1fb08/sensors-23-08280-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/43522039eee1/sensors-23-08280-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/1495cf339906/sensors-23-08280-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/c03d6a02b32e/sensors-23-08280-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/49685a81050f/sensors-23-08280-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/14770045ded7/sensors-23-08280-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/e9cb3df1fb08/sensors-23-08280-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/11324d78249e/sensors-23-08280-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/1f94b8769b28/sensors-23-08280-g002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/071f7a7e3a7c/sensors-23-08280-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/9eff93e2ab3d/sensors-23-08280-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/04364d33bf64/sensors-23-08280-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/43522039eee1/sensors-23-08280-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/1495cf339906/sensors-23-08280-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/c03d6a02b32e/sensors-23-08280-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/49685a81050f/sensors-23-08280-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/515733ec01bf/sensors-23-08280-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/14770045ded7/sensors-23-08280-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d114/10575043/e9cb3df1fb08/sensors-23-08280-g014.jpg

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