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使用金属微滴形成的微通道。

Microchannels Formed Using Metal Microdroplets.

作者信息

Zhang Daicong, Jing Chunhui, Guo Wei, Xiao Yuan, Luo Jun, Qi Lehua

机构信息

School of Mechanical & Electronic Engineering, Xi'an Polytechnic University, Xi'an 710048, China.

School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an 710072, China.

出版信息

Micromachines (Basel). 2023 Oct 10;14(10):1922. doi: 10.3390/mi14101922.

Abstract

The metal microdroplet deposition manufacturing technique has gained extensive attention due to its potential applications in microstructure fabrication. In order to fabricate components such as microchannel heat sinks and microchannel reactors, this paper investigates the interactions and influences between microdroplets and substrates, as well as between microdroplets themselves. The transient phenomena during the fusion of metal microdroplets in contact with the substrate and the formation of inclined columns, as well as the solid-liquid coupling and morphology formation processes during the collision between microdroplets, are analyzed. The influence of microdroplet spacing on the morphology of microchannels during their formation is specifically studied. A three-dimensional finite element numerical model for the deposition of metal microdroplets forming inclined pillars is established based on the volume of fluid (VOF) method. The model treats the protective gas around the microdroplet as an empty zone and the microdroplet as a single-phase fluid. Simulation analysis is conducted to investigate the forming patterns of unsupported microdroplets at different spacing and their impact on the fusion morphology of microchannel components. Building upon this, a series of validation experiments are conducted using a piezoelectric microdroplet generator to produce uniform aluminum alloy microdroplets with a diameter of approximately 600 μm. A method for fabricating metal microchannel structures is obtained, which is expected to be applied in fields such as scattering structures for high-power electronic devices and microreactors in microchemical fields.

摘要

金属微滴沉积制造技术因其在微结构制造中的潜在应用而受到广泛关注。为了制造微通道散热器和微通道反应器等部件,本文研究了微滴与基板之间以及微滴彼此之间的相互作用和影响。分析了与基板接触的金属微滴融合过程中的瞬态现象以及倾斜柱的形成,以及微滴碰撞过程中的固液耦合和形态形成过程。特别研究了微滴间距对微通道形成过程中形态的影响。基于流体体积(VOF)方法建立了用于形成倾斜柱的金属微滴沉积的三维有限元数值模型。该模型将微滴周围的保护气体视为空区域,将微滴视为单相流体。进行模拟分析以研究不同间距下无支撑微滴的形成模式及其对微通道部件融合形态的影响。在此基础上,使用压电微滴发生器进行了一系列验证实验,以产生直径约为600μm的均匀铝合金微滴。获得了一种制造金属微通道结构的方法,有望应用于高功率电子设备的散射结构和微化学领域的微反应器等领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/836a/10609490/d217d324fc08/micromachines-14-01922-g001.jpg

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