一种用于无参数MEMS结构设计的新型进化方法及其在压阻式压力传感器中的应用。

A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors.

作者信息

Meng Qinggang, Wang Junbo, Chen Deyong, Chen Jian, Xie Bo, Lu Yulan

机构信息

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, 100190 Beijing, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, 100049 Beijing, China.

出版信息

Microsyst Nanoeng. 2023 Oct 25;9:134. doi: 10.1038/s41378-023-00596-y. eCollection 2023.

DOI:10.1038/s41378-023-00596-y

PMID:37900976

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10600208/

Abstract

In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V MPa and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance.

摘要

本文提出了一种基于模拟的新型进化方法，用于设计具有最大自由度的无参数微机电系统（MEMS）结构。这种新颖的设计方法通过权衡结构各部分的属性实现了半自动结构进化，并在多次迭代后产生了优化设计。所提出的方法被用于优化压阻式压力传感器（PPS）的压敏膜片。有限元方法（FEM）模拟表明，与没有岛状结构和具有方形岛状结构的传统膜片相比，优化后的膜片应力分别增加了10%和16%，非线性分别降低了57%和77%。这些改进证明了该方法的价值。对制造的PPS进行表征，结果显示在20°C时具有8.8 mV V MPa的高灵敏度和0.058% FS的低非线性，表明传感器性能优异。