Zhang Yuanying, Liu Fengyun, Zhou Zechen, Liang Xiubing, Sun Riming, Deng Jinjun, Luo Xiaoliang, Lin Jian, Chen Xing, Zhang Xingxu, Luo Jian, Wang Xiaojing, Ma Binghe
The Key Laboratory of Micro and Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, 700200, Xi'an, China.
The Advanced Interdisciplinary Technology Research Center in National Innovation Institute of Defense Technology, 100071, Beijing, China.
Microsyst Nanoeng. 2025 Jun 12;11(1):122. doi: 10.1038/s41378-025-00959-7.
High-precision piezoresistive pressure sensors play a significant role in aerospace, automotive, and other fields. Nonlinear error is the key factor that restricts the improvement of the sensor precision. A mathematical model for evaluating the sensor's nonlinear error is established, based on which a piezoresistor sensitivity matching method is proposed to suppress the nonlinear error. By adjusting the piezoresistors' structure and position on the sensing membrane, four piezoresistors with equal sensitivity are obtained, and theoretical quasi-zero nonlinear error is achieved. To verify the design, sensor prototypes are fabricated utilizing the MEMS technology. After sensor packaging, a cylindrical absolute pressure sensor featuring a 4 mm diameter with a range from 0 to 100 kPa is acquired. The experimental results demonstrate the excellent performance of the proposed sensor, which indicates a nonlinear error as low as ±0.004%FS. Besides, the proposed sensor has a sensitivity of 1.6810 mV/kPa, a hysteresis of 0.025%, a repeatability of 0.015%, a zero drift of 0.03%FS, and a 3 dB frequency from 0 to 121.82 kHz. Moreover, the prototype is tested in the Mach 4 wind tunnel, and the measurement error between the proposed sensor and the true pressure is ±0.98%. This paper provides key sensing technology for high-precision surface pressure analysis of aircraft.
高精度压阻式压力传感器在航空航天、汽车等领域发挥着重要作用。非线性误差是制约传感器精度提升的关键因素。建立了用于评估传感器非线性误差的数学模型，并在此基础上提出了一种压阻灵敏度匹配方法来抑制非线性误差。通过调整压阻在传感膜上的结构和位置，获得了灵敏度相等的四个压阻，实现了理论上的准零非线性误差。为验证该设计，利用微机电系统（MEMS）技术制作了传感器原型。经过传感器封装后，得到了一个直径为4毫米、量程为0至100千帕的圆柱形绝对压力传感器。实验结果表明所提出的传感器性能优异，其非线性误差低至±0.004%FS。此外，所提出的传感器灵敏度为1.6810毫伏/千帕，滞后率为0.025%，重复性为0.015%，零点漂移为0.03%FS，3分贝频率范围为0至121.82千赫。此外，该原型在马赫4风洞中进行了测试，所提出的传感器与真实压力之间的测量误差为±0.98%。本文为飞机高精度表面压力分析提供了关键传感技术。
