硅有机混合电光调制器及微波光子学信号处理应用

Silicon-Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications.

作者信息

Zhou Zihan, Chao Meng, Su Xinxin, Fu Shuanglin, Liu Ruonan, Li Zhihua, Bo Shuhui, Chen Zhuo, Wu Zhenlin, Han Xiuyou

机构信息

School of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.

Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

出版信息

Micromachines (Basel). 2023 Oct 25;14(11):1977. doi: 10.3390/mi14111977.

DOI:10.3390/mi14111977

PMID:38004834

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10673456/

Abstract

Electro-optic modulator (EOM) is one of the key devices of high-speed optical fiber communication systems and ultra-wideband microwave photonic systems. Silicon-organic hybrid (SOH) integration platform combines the advantages of silicon photonics and organic materials, providing a high electro-optic effect and compact structure for photonic integrated devices. In this paper, we present an SOH-integrated EOM with comprehensive investigation of EOM structure design, silicon waveguide fabrication with Slot structure, on-chip poling of organic electro-optic material, and characterization of EO modulation response. The SOH-integrated EOM is measured with 3 dB bandwidth of over 50 GHz and half-wave voltage length product of 0.26 V·cm. Furthermore, we demonstrate a microwave photonics phase shifter by using the fabricated SOH-integrated dual parallel Mach-Zehnder modulator. The phase shift range of 410° is completed from 8 GHz to 26 GHz with a power consumption of less than 38 mW.

摘要

电光调制器（EOM）是高速光纤通信系统和超宽带微波光子系统的关键器件之一。硅基有机混合（SOH）集成平台结合了硅光子学和有机材料的优点，为光子集成器件提供了高电光效应和紧凑的结构。在本文中，我们展示了一种SOH集成的EOM，并对EOM结构设计、具有槽结构的硅波导制造、有机电光材料的片上极化以及电光调制响应特性进行了全面研究。该SOH集成的EOM测量得到的3 dB带宽超过50 GHz，半波电压长度积为0.26 V·cm。此外，我们利用所制造的SOH集成双并行马赫-曾德尔调制器演示了一种微波光子移相器。在8 GHz至26 GHz范围内实现了410°的相移范围，功耗小于38 mW。