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通过级联聚酰亚胺涂层长周期光纤光栅和聚二甲基硅氧烷包裹的马赫-曾德尔干涉仪实现的高灵敏度湿度和温度传感器。

High-sensitivity humidity and temperature sensor by cascading a polyimide coated long period fiber grating and a polydimethylsiloxane wrapped Mach-Zehnder interferometer.

作者信息

Jiang Wenbo, Sun Simei, Song Jiao, Gao Jiawei, Hu Chuanju, Li Li, Deng Longfeng, Chen Fulin

机构信息

College of Physics and Electronic Science, Hubei Normal University, Huangshi, Hubei 435002, China.

出版信息

Rev Sci Instrum. 2023 Dec 1;94(12). doi: 10.1063/5.0163910.

Abstract

Two different structures, long period fiber grating (LPFG) and a Mach-Zehnder interferometer (MZI), were cascaded to fabricate a sensor for sensing humidity and temperature simultaneously. Due to the humidity sensitive characteristic of polyimide (PI) and the temperature sensitive characteristic of polydimethylsiloxane (PDMS), the LPFG was coated with PI and the MZI was wrapped in PDMS to improve the humidity and temperature sensitivities, respectively. Humidity and temperature experiments and the stability and repeatability of the proposed sensors were performed. The sensor shows humidity and temperature sensitivities of ∼164 pm/%RH and 183 pm/°C in the humidity and temperature increasing experiments, respectively. Combining increasing, decreasing, and repeatable experiments of temperature and humidity, the proposed sensor shows stable performance in humidity sensitivity of ∼159 pm/%RH and temperature sensitivity of ∼175 pm/°C, with good linearity of ∼0.994. The structure of the proposed sensor has the advantages of low implementation cost, easy fabrication, and good stability.

摘要

将长周期光纤光栅(LPFG)和马赫-曾德尔干涉仪(MZI)这两种不同结构级联,制作出一种能够同时传感湿度和温度的传感器。由于聚酰亚胺(PI)的湿度敏感特性和聚二甲基硅氧烷(PDMS)的温度敏感特性,分别在LPFG上涂覆PI,在MZI上包裹PDMS,以提高湿度和温度灵敏度。进行了湿度和温度实验以及所提出传感器的稳定性和重复性实验。在湿度和温度增加实验中,该传感器的湿度和温度灵敏度分别约为164 pm/%RH和183 pm/°C。结合温度和湿度的增加、降低及重复性实验,所提出的传感器在湿度灵敏度约为159 pm/%RH和温度灵敏度约为175 pm/°C时表现出稳定的性能,线性度约为0.994。所提出传感器的结构具有实施成本低、易于制造和稳定性好的优点。

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