Chiou Jin-Chern, Wu Chin-Cheng, Lin Tse-Mei, Huang Yu-Chieh
Department of Electronics and Electrical Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.
Institute of Electrical and Control Engineering, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City 30010, Taiwan.
Polymers (Basel). 2023 Dec 26;16(1):74. doi: 10.3390/polym16010074.
This study proposed a SU-8 based gas sensor, integrated with heater and sensing electrodes, to develop a multi-channel gas sensor with PEG/SWCNTs composite films. The impedance of single-walled carbon nanotubes (SWCNTs) on each sensing electrode was well controlled via dielectrophoresis technology. To investigate dielectrophoretic mobility characteristics, the concentric circular sensing electrode has three different spacing between the inner and outer electrodes, including 10 μm, 15 μm, and 20 μm. The electrodes were applied with a 5 MHz AC source with a voltage ranging from 1 Vpp to 5 Vpp. Polyethylene glycol (PEG) was deposited on the gas sensor via drop casting. The fabricated gas sensor was operated at different working temperatures, including 25 °C, 40 °C, 50 °C and 60 °C, to examine the sensing response. The response results revealed that the PEG/SWCNTs composites gas sensor with 60 °C working temperature exhibited the ability to detect 80 ppm ethanol vapor.
本研究提出了一种基于SU-8的气体传感器，该传感器集成了加热器和传感电极，以开发一种带有聚乙二醇/单壁碳纳米管（PEG/SWCNTs）复合薄膜的多通道气体传感器。通过介电泳技术可以很好地控制每个传感电极上的单壁碳纳米管（SWCNTs）的阻抗。为了研究介电泳迁移特性，同心圆形传感电极的内电极和外电极之间有三种不同的间距，分别为10μm、15μm和20μm。给电极施加一个5MHz的交流电源，电压范围为1Vpp至5Vpp。通过滴铸法将聚乙二醇（PEG）沉积在气体传感器上。将制作好的气体传感器在不同的工作温度下运行，包括25°C、40°C、50°C和60°C，以检测传感响应。响应结果表明，工作温度为60°C的PEG/SWCNTs复合气体传感器具有检测80ppm乙醇蒸汽的能力。
