使用扫描白光干涉仪同时测量熔融石英的群折射率色散和厚度

Simultaneous Measurement of Group Refractive Index Dispersion and Thickness of Fused Silica Using a Scanning White Light Interferometer.

作者信息

Lee Heesu, Hwang Seungjin, Kong Hong Jin, Hong Kyung Hee, Yu Tae Jun

机构信息

Department of Computer Science and Electrical Engineering, Handong Global University, Pohang 37554, Republic of Korea.

HIL Lab Inc., Pohang 37563, Republic of Korea.

出版信息

Sensors (Basel). 2023 Dec 19;24(1):17. doi: 10.3390/s24010017.

DOI:10.3390/s24010017

PMID:38202879

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10780972/

Abstract

In this study, we simultaneously measured the group refractive index dispersion and thickness of fused silica using a scanning white light interferometer on a spectral range from 800 to 1050 nm. A delay error correction was performed using a He-Ne laser. The accuracy of the measured group refractive index dispersion of fused silica, when compared to the temperature-dependent Sellmeier equation, is within 4 × 10.

摘要

在本研究中，我们使用扫描白光干涉仪在800至1050nm的光谱范围内同时测量了熔融石英的群折射率色散和厚度。使用氦氖激光器进行了延迟误差校正。与温度相关的塞耳迈耶方程相比，熔融石英群折射率色散的测量精度在4×10以内。