Sun Zhi-Juan, Liu Yu-Qing, Wan Jia-Yi, Liu Xue-Qing, Han Dong-Dong, Chen Qi-Dai, Zhang Yong-Lai
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China.
Center for Advanced Optoelectronic Functional Materials Research, and Key Laboratory for UV Emitting Materials and Technology of Ministry of Education, National Demonstration Center for Experimental Physics Education, Northeast Normal University, 5268 Renmin Street, Changchun 130024, China.
ACS Appl Mater Interfaces. 2024 Feb 21;16(7):9581-9592. doi: 10.1021/acsami.4c01030. Epub 2024 Feb 8.
Microlens arrays (MLAs) with a tunable imaging ability are core components of advanced micro-optical systems. Nevertheless, tunable MLAs generally suffer from high power consumption, an undeformable rigid body, large and complex systems, or limited focal length tunability. The combination of reconfigurable smart materials with MLAs may lead to distinct advantages including programmable deformation, remote manipulation, and multimodal tunability. However, unlike photopolymers that permit flexible structuring, the fabrication of tunable MLAs and compound eyes (CEs) based on transparent smart materials is still rare. In this work, we report reconfigurable MLAs that enable tunable imaging based on shape memory polymers (SMPs). The smart MLAs with closely packed 200 × 200 microlenses (40.0 μm in size) are fabricated via a combined technology that involves wet etching-assisted femtosecond laser direct writing of MLA templates on quartz, soft lithography for MLA duplication using SMPs, and the mechanical heat setting for programmable reconfiguration. By stretching or squeezing the shape memory MLAs at the transition temperature (80 °C), the size, profiles, and spatial distributions of the microlenses can be programmed. When the MLA is stretched from 0 to 120% (area ratio), the focal length is increased from 116 to 283 μm. As a proof of concept, reconfigurable MLAs and a 3D CE with a tunable field of view (FOV, 160-0°) have been demonstrated in which the thermally triggered shape memory deformation has been employed for tunable imaging. The reconfigurable MLAs and CEs with a tunable focal length and adjustable FOV may hold great promise for developing smart micro-optical systems.
具有可调成像能力的微透镜阵列(MLA)是先进微光学系统的核心组件。然而,可调MLA通常存在高功耗、不可变形的刚体、大型复杂系统或有限的焦距可调性等问题。可重构智能材料与MLA的结合可能会带来显著优势,包括可编程变形、远程操纵和多模态可调性。然而,与允许灵活结构化的光聚合物不同,基于透明智能材料的可调MLA和复眼(CE)的制造仍然很少见。在这项工作中,我们报告了基于形状记忆聚合物(SMP)的可重构MLA,其能够实现可调成像。通过一种组合技术制造了具有紧密排列的200×200个微透镜(尺寸为40.0μm)的智能MLA,该技术包括在石英上进行湿法蚀刻辅助飞秒激光直接写入MLA模板、使用SMP进行MLA复制的软光刻以及用于可编程重构的机械热定型。通过在转变温度(80°C)下拉伸或挤压形状记忆MLA,可以对微透镜的尺寸、轮廓和空间分布进行编程。当MLA从0拉伸到120%(面积比)时,焦距从116μm增加到283μm。作为概念验证,已经展示了具有可调视场(FOV,160 - 0°)的可重构MLA和3D CE,其中热触发的形状记忆变形已用于可调成像。具有可调焦距和可调FOV的可重构MLA和CE对于开发智能微光学系统可能具有巨大的潜力。