Dong Hao, Liu Pengbo, Lu Shuaishuai, Yan Peng, Sun Qiyuan
School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China.
Shandong Institute of Mechanical Design and Research, Jinan 250031, China.
Micromachines (Basel). 2024 Feb 28;15(3):338. doi: 10.3390/mi15030338.
Technological advancements across various sectors are driving a growing demand for large-scale three-degree-of-freedom micro-nano positioning platforms, with substantial pressure to reduce footprints while enhancing motion range and accuracy. This study proposes a three-prismatic-revolute-revolute (3-PRR) parallel mechanism based on biomimetic variable-diameter helical flexible hinges. The resulting platform achieves high-precision planar motion along the X- and Y-axes, a centimeter-level translation range, and a rotational range of 35° around the Z-axis by integrating six variable-diameter flexible helical hinges that serve as rotational joints when actuated by three miniature linear servo drives. The drives are directly connected to the moving platform, thereby enhancing the compactness of the system. A kinematic model of the motion platform was established, and the accuracy and effectiveness of the forward and inverse kinematic solutions were validated using finite element analysis. Finally, a prototype of the 3-PRR parallel platform was fabricated, and its kinematic performance was experimentally verified visually for improved endpoint displacement detection. The assessment results revealed a maximum displacement error of 9.5% and confirmed that, judging by its favorable workspace-to-footprint ratio, the final system is significantly more compact than those reported in the literature.
各个领域的技术进步推动了对大规模三自由度微纳定位平台的需求不断增长,在减小占地面积的同时增加运动范围和精度面临巨大压力。本研究提出了一种基于仿生变径螺旋柔性铰链的三棱柱-旋转-旋转(3-PRR)并联机构。通过集成六个变径柔性螺旋铰链,该平台在由三个微型线性伺服驱动器驱动时作为旋转关节,从而实现了沿X轴和Y轴的高精度平面运动、厘米级平移范围以及绕Z轴35°的旋转范围。驱动器直接连接到移动平台,从而提高了系统的紧凑性。建立了运动平台的运动学模型,并使用有限元分析验证了正运动学和逆运动学解的准确性和有效性。最后,制作了3-PRR并联平台的原型,并通过视觉方式对其运动学性能进行了实验验证,以改进端点位移检测。评估结果显示最大位移误差为9.5%,并证实,从其良好的工作空间与占地面积之比来看,最终系统比文献中报道的系统要紧凑得多。