Zhang Quan, Zhao Jianguo, Shen Xin, Xiao Qing, Huang Jun, Wang Yuan
School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China.
National Research Center of Pumps, Jiangsu University, Zhenjiang 212013, China.
Micromachines (Basel). 2019 Aug 31;10(9):581. doi: 10.3390/mi10090581.
A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano's second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.
本文设计了一种基于桥式放大机构和平行四边形机构的新型解耦XY柔顺微定位平台。利用卡斯蒂利亚诺第二定理和梁约束模型建立了桥式放大机构和平行四边形机构的解析模型。基于所提出的模型，进一步推导了该平台的放大倍数、输入刚度和输出刚度。为了验证理论分析，采用有限元方法（FEM）进行仿真和模态分析，仿真结果表明，该平台放大倍数、输入刚度和输出刚度在模型与有限元结果之间的误差分别为2.34%、3.87%和2.66%。模态分析结果表明，基频为44Hz，理论模型与有限元之间的最大误差小于4%，进一步验证了所提出的建模方法。最后，制作了原型来测试放大倍数、交叉耦合误差和工作空间。实验结果表明，该平台具有较大的工作空间，为346.1μm×357.2μm，X轴和Y轴的相应放大倍数分别为5.39和5.51，而交叉耦合误差小于1.5%。
