Lu Wanping, Zhu Zhiwei, Willenberg Benjamin, Pupeikis Justinas, Phillips Christopher R, Keller Ursula, Chen Shih-Chi
Opt Lett. 2024 Apr 1;49(7):1766-1769. doi: 10.1364/OL.507661.
Dual-comb microscopy enables high-speed and high-precision optical sampling by simultaneously extracting both amplitude and phase information from the interference signals with frequency division multiplexing. In this Letter, we introduce a spatiotemporal encoding approach for dual-comb microscopy that overcomes previous limitations such as mechanical scanning, low sampling efficiency, and system complexity. By employing free-space angular-chirp-enhanced delay (FACED) and a low-noise single-cavity dual-comb laser, we achieve scan-less 3D imaging with nanometer precision and a 3D distance-imaging rate of 330 Hz, restricted only by the repetition rate difference of the dual-comb laser. Specifically, the FACED unit linearly arranges the laser beam into an array. A grating subsequently disperses this array transversely into lines, facilitating ultrafast spectroscopic applications that are 1-2 orders of magnitude quicker than traditional dual-comb methods. This spatiotemporal encoding also eases the stringent conditions on various dual-comb laser parameters, such as repetition rates, coherence, and stability. Through carefully designed experiments, we demonstrate that our scan-less system can measure 3D profiles of microfabricated structures at a rate of 7 million pixels per second. Our method significantly enhances measurement speed while maintaining high precision, using a compact light source. This advancement has the potential for broad applications, including phase imaging, surface topography, distance ranging, and spectroscopy.
双梳状显微镜通过频分复用从干涉信号中同时提取幅度和相位信息,实现了高速和高精度的光学采样。在本信函中,我们介绍了一种用于双梳状显微镜的时空编码方法,该方法克服了诸如机械扫描、低采样效率和系统复杂性等先前的限制。通过采用自由空间角啁啾增强延迟(FACED)和低噪声单腔双梳状激光器,我们实现了无扫描三维成像,精度达到纳米级,三维距离成像速率为330Hz,仅受双梳状激光器重复频率差的限制。具体而言,FACED单元将激光束线性排列成阵列。随后,光栅将该阵列横向分散成线条,便于实现比传统双梳状方法快1至2个数量级的超快光谱应用。这种时空编码还放宽了对各种双梳状激光器参数(如重复频率、相干性和稳定性)的严格要求。通过精心设计的实验,我们证明我们的无扫描系统能够以每秒700万个像素的速率测量微纳加工结构的三维轮廓。我们的方法在使用紧凑光源的同时,显著提高了测量速度并保持了高精度。这一进展具有广泛的应用潜力,包括相位成像、表面形貌、距离测量和光谱学。