Huang Bingfang, Feng Jiyong, He Junkai, Huang Weibo, Huang Junhua, Yang Shaodian, Duan Wenfeng, Zhou Zheng, Zeng Zhiping, Gui Xuchun
State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510275, China.
School of Electronics and Information Engineering, Guangzhou City University of Technology, Guangzhou 510800, China.
ACS Appl Mater Interfaces. 2024 Apr 17;16(15):19298-19308. doi: 10.1021/acsami.4c04156. Epub 2024 Apr 3.
Flexible piezoresistive pressure sensors have received great popularity in flexible electronics due to their simple structure and promising applications in health monitoring and artificial intelligence. However, the contradiction between sensitivity and detection range limits the application of the sensors in the medium-pressure regime. Here, a flexible piezoresistive pressure sensor is fabricated by combining a hierarchical spinous microstructure sensitive layer and a periodic microsphere array spacer. The sensor achieves high sensitivity (39.1 kPa) and outstanding linearity (0.99, coefficient) in a medium-pressure regime, as well as a wide range of detection (100 Pa-160.0 kPa), high detection precision (<0.63‰ full scale), and excellent durability (>5000 cycles). The mechanism of the microsphere array spacer in improving sensitivity and detection range was revealed through finite element analysis. Furthermore, the sensors have been utilized to detect muscle and joint movements, spatial pressure distributions, and throat movements during pronouncing words. By means of a full-connect artificial neural network for machine learning, the sensor's output of different pronounced words can be precisely distinguished and classified with an overall accuracy of 96.0%. Overall, the high-performance flexible pressure sensor based on a microsphere array spacer has great potential in health monitoring, human-machine interface, and artificial intelligence of medium-pressure regime.
柔性压阻式压力传感器因其结构简单且在健康监测和人工智能领域具有广阔应用前景，在柔性电子学中备受青睐。然而，灵敏度与检测范围之间的矛盾限制了这类传感器在中压领域的应用。在此，通过将分层棘状微结构敏感层与周期性微球阵列间隔层相结合，制备出一种柔性压阻式压力传感器。该传感器在中压范围内实现了高灵敏度（39.1 kPa）和出色的线性度（0.99，系数），以及宽检测范围（100 Pa - 160.0 kPa）、高检测精度（<0.63‰满量程）和优异的耐久性（>5000次循环）。通过有限元分析揭示了微球阵列间隔层提高灵敏度和检测范围的机制。此外，这些传感器已被用于检测肌肉和关节运动、空间压力分布以及发音时的喉咙运动。借助用于机器学习的全连接人工神经网络，能够精确区分和分类传感器对不同发音单词的输出，总体准确率达96.0%。总体而言，基于微球阵列间隔层的高性能柔性压力传感器在中压领域的健康监测、人机接口和人工智能方面具有巨大潜力。
